Convac
Convac M6000 service, repair and spare parts
Service, repair and spare parts for Convac M6000 coater, developer and lift-off tracks – including calibration and fine tuning of complete systems.
Coater, developer, lift-off
M6000 tracks in all three configurations.
Calibration
Complete systems calibrated and fine tuned.
Robots and handling
Frogleg indexer robots and carrier indexers.
Spare parts in stock
Hotplates, chucks, spin motors and boards.
What we do on the Convac M6000
We have worked on M6000 tracks in many configurations, for example a GaAs double coater with two hotplates and one coolplate built in 1993, and a special coater/developer track with two hotplates, an HMDS stack, two coolplates, three frogleg indexer robots and two carrier indexers. On that track all pneumatic functions were out of order and the movements were too fast or too slow. We calibrated and fine tuned the tool, and it went back into production.
- Calibration and fine tuning of complete M6000 tracks
- Repair of pneumatic functions and motion timing
- Service of frogleg indexer robots and carrier indexers
- Hotplate, coolplate and HMDS module repair
- Developer chucks with edge contact only, for a particle-free wafer backside
Convac M6000 spare parts in stock
Parts for M6000 tracks from our stock. Ask us if the part you need is not listed.
FAQ
Frequently asked questions
Can you bring an M6000 track back into production?
Yes. We have calibrated and fine tuned M6000 tracks whose pneumatics and motion timing were out of order, and released them back to production.
Do you support M6000 lift-off tracks?
Yes. We service M6000 coater, developer and lift-off tracks.
Do you have spare parts for the M6000?
Yes. We hold parts such as hotplates, chucks, spin motors, robots and control boards in stock.
Tell us about your Convac M6000
Send us the track configuration, the fault and your timeline. We reply with an assessment, the parts we hold and a quote.