Spare parts
Spare parts for legacy lithography equipment
More than 800 used, surplus and refurbished parts for SUSS MicroTec, Convac, BLE, SSE and SVG coaters, developers, hotplates and spin processors. Search by part number, manufacturer or tool platform.
Browse all parts Request a part
- Control Electronics & PCB Boards446 parts
- Motors, Drives & Motion Control214 parts
- Wafer Chucks, Inlays & Vacuum Parts17 parts
- Coater & Spin-Coater Parts45 parts
- Developer, Wet Process & Chemical Handling35 parts
- Hotplate, Coolplate & Thermal Parts37 parts
- Pneumatics, Vacuum & Fluidics23 parts
- Chillers, Cooling & Temperature Control10 parts
- Mechanical Assemblies & Tooling1 part
Browse by equipment
Parts by manufacturer and tool platform
Manufacturer / OEM
Component brands
Browse by component manufacturer
- Lippert 102
- Metronix 70
- Cybor 37
- Novotron 33
- PMA 29
- Convac 28
- Genmark 24
- Karl Suss / SÜSS MicroTec 21
- Iwaki 20
- Omron 19
- Balluff 18
- SMC 16
- Trinamic 16
- Thermalogic 14
- Gunda Electronic 13
- Intelligent Motion Systems 13
- IPD 13
- SBS Technologies 13
- Vero Power 13
- MGV 12
- Jumo 11
- Pribyl Wafertec 11
- Siemens 11
- Asyst 10
Condition grades
What our condition labels mean
Every listing states the condition of the part. If you need more detail – photos, test records or the history of a part – just ask.
New surplus
Unused parts from surplus stock, often in the original packaging.
Refurbished
Overhauled and checked before sale; worn parts replaced where needed.
Tested used
Used parts from working equipment, function-tested before sale.
Used (untested)
Removed from equipment but not tested. Condition as described in the listing.
For parts / defective
Defective or incomplete – for repair, salvage or as a source of components.
Remanufactured
Rebuilt to original specification with worn components replaced.
Why APEX
Parts from people who service these tools
Search by part number
Type the OEM part number, model or a keyword – the search covers titles, descriptions and part numbers.
Clear condition grades
From new surplus to for-parts: you know what you get before you order.
Repair and exchange
Many modules can be repaired or exchanged instead of replaced. Our service team knows the tools.
Help with sourcing
Part not listed? Send us the part number – we often have more in stock than is online.
FAQ
Questions about spare parts
How do I find a part by its part number?
Enter the OEM part number in the search at the top of this page. The search checks product titles, descriptions and the stored part numbers. You can also browse by category, manufacturer or tool platform.
The part I need is not listed. Can you still help?
Yes. Only part of our stock is online, and we can often source parts from our network. Send us the part number, the tool type and a photo if possible.
Are the parts tested?
The condition is stated on every listing. “Tested used” parts were function-tested; “Used (untested)” parts were not. Ask us if you need details for a specific part.
What does “On request” mean?
The part is not immediately available or the price depends on the configuration. Send an inquiry and we will reply with availability and a quote.
Can you repair or exchange a defective module?
For many boards, motors, controllers and hotplates we offer repair or an exchange unit. Contact us with the part number and a description of the fault.
Contact
Can’t find your part?
Tell us the part number, tool and quantity. We check our stock and network and get back to you with availability and a quote.