Since 1949

Founded by Karl Süss in Munich; took over Convac and Fairchild in 1999.

Coater/developer service

Falcon, ACS 200, Gamma 60/80, Delta and RC8.

Refurbishment

Modules to OEM standards, plus arms, hotplates, robots and pumps.

Service contracts

Worldwide, with online and telephone support.

SUSS MicroTec Story

Karl Süss founded the company in Munich in 1949. Today SUSS MicroTec supplies equipment and process solutions for microstructuring, including lithography, coating, wafer bonding and photomask processing.

In 1999, SUSS took over Convac and Fairchild Technologies, adding their coater/developer systems such as the Falcon to its range. Many SUSS coating and developing tools, including Falcon, ACS 200, Gamma, Delta and RC8, are still in production today.

SUSS MicroTec Services

We service, repair and refurbish SUSS MicroTec and Karl Suss coater/developer equipment: Falcon, ACS 200 Classic and ACS 200 Plus, Gamma 60/80, Delta and RC8.

Full service and maintenance, with service contracts worldwide
Refurbishment of coater and developer modules to OEM standards
Rebuilds of dispense arms, hotplates and coolplates, robots and pumps
Process upgrades for existing tools
Spare parts and complete modules from our own stock
Online and telephone support

Spin coater repair →

Model pages: Falcon · SUSS ACS 200 · SUSS Gamma 60/80 · SUSS RC8

Tools and projects

SUSS FALCON / ACS 200 PLUS / GAMMA 60 – 80 / DELTA

We refurbish and repair Suss Microtec Falcon, ACS 200 Plus, Suss Gamma 60/80 and Delta Coater Developer Alta Spray etc.

We refurbish, repair and rebuild hotplates and coolplates and are able to offer improvements.

For the Falcon we offer refurbishments on Coater or Developer Modules. Also we refurbish Dispense arm assemblies, robots, pumps etc.

Over the years we have build up a large stock of spare parts and also complete modules. Our stock includes Novotron Spin Motor controllers, Kobold Spin Motors and other models, PC7 controllers, Lippert Automation Boards, Genmark spares, chucks etc.

SUSS MICROTEC GAMMA COATER DEVELOPER TRACK SYSTEM WITH 2 HOTPLATES AND 1 HMDS HOTPLATE, 2 STORAGE COOLPLATES

We perform full service and maintenance for the Gamma machines.
Service contracts are available world wide.
Online Service Telephone support
Call us if you have strange problems with your tool

SUSS MICROTEC ACS DEVELOPER MODULE

We refurbish the ACS modules to OEM standards
Replacing all fittings and process valves where appropriate we refurbish
We rebuild the Dispense Arm Hardware, exchange stepper motors and slides re-tube and re-wire the system
Calibration of the Arm movements Process testing with the MMC SW Final Testing and pre-acceptance

FULL REFURBISHMENT SERVICE ON CONVAC & SUSS FALCON MODULES

This Falcon Developer Module has been in production for over 10 years
The Module was so badly worn that the module needed full refurbishment
All valves, tubes and fittings were exchanged
The Developer Arm was rebuild with new stepper motors, spindles and slides and bearings
The Module was completely stripped, decontaminated, rebuild and calibrated
The MMC Software is very flexible and allows to take out a defective Module from the Process Flow, so the rest of the Falcon can continue to stay in production

FALCON DEVELOPER MODULE FULL REFURBISHMENT

Taking the module completely apart in different assembly groups. Preparing to exchange cables, tubing, valves. Taking out the electrical parts assemblies and the pneumatical assemblies. Stripping the module to it´s empty shell in order to clean and decontaminate the module.

KARL SUSS ACS 200 CLASSIC

We refurbish and repair Karl Suss ACS 200 Classic tracks and stand alone RC8 tools.

Over the years we have build up a large stock of spare parts and also modules such as RC8 Coater, Developer, HCV and MHU modules.

We refurbish and rebuild hotplates and coolplates and are able to offer improvements.

Video

KARL SUSS – SUSS MICROTEC

Watch on Vimeo ↗