Legacy equipment support
KARL SUSS – SUSS MICROTEC
Spare Parts, Service and Upgrades
Since 1949
Founded by Karl Süss in Munich; took over Convac and Fairchild in 1999.
Coater/developer service
Falcon, ACS 200, Gamma 60/80, Delta and RC8.
Refurbishment
Modules to OEM standards, plus arms, hotplates, robots and pumps.
Service contracts
Worldwide, with online and telephone support.
SUSS MicroTec Story
Karl Süss founded the company in Munich in 1949. Today SUSS MicroTec supplies equipment and process solutions for microstructuring, including lithography, coating, wafer bonding and photomask processing.
In 1999, SUSS took over Convac and Fairchild Technologies, adding their coater/developer systems such as the Falcon to its range. Many SUSS coating and developing tools, including Falcon, ACS 200, Gamma, Delta and RC8, are still in production today.
SUSS MicroTec Services
We service, repair and refurbish SUSS MicroTec and Karl Suss coater/developer equipment: Falcon, ACS 200 Classic and ACS 200 Plus, Gamma 60/80, Delta and RC8.
- Full service and maintenance, with service contracts worldwide
- Refurbishment of coater and developer modules to OEM standards
- Rebuilds of dispense arms, hotplates and coolplates, robots and pumps
- Process upgrades for existing tools
- Spare parts and complete modules from our own stock
- Online and telephone support
Model pages: Falcon · SUSS ACS 200 · SUSS Gamma 60/80 · SUSS RC8
Tools and projects

SUSS FALCON / ACS 200 PLUS / GAMMA 60 – 80 / DELTA
We refurbish and repair Suss Microtec Falcon, ACS 200 Plus, Suss Gamma 60/80 and Delta Coater Developer Alta Spray etc.
We refurbish, repair and rebuild hotplates and coolplates and are able to offer improvements.
For the Falcon we offer refurbishments on Coater or Developer Modules. Also we refurbish Dispense arm assemblies, robots, pumps etc.
Over the years we have build up a large stock of spare parts and also complete modules. Our stock includes Novotron Spin Motor controllers, Kobold Spin Motors and other models, PC7 controllers, Lippert Automation Boards, Genmark spares, chucks etc.

SUSS MICROTEC GAMMA COATER DEVELOPER TRACK SYSTEM WITH 2 HOTPLATES AND 1 HMDS HOTPLATE, 2 STORAGE COOLPLATES
- We perform full service and maintenance for the Gamma machines.
- Service contracts are available world wide.
- Online Service Telephone support
- Call us if you have strange problems with your tool

SUSS MICROTEC ACS DEVELOPER MODULE
- We refurbish the ACS modules to OEM standards
- Replacing all fittings and process valves where appropriate we refurbish
- We rebuild the Dispense Arm Hardware, exchange stepper motors and slides re-tube and re-wire the system
- Calibration of the Arm movements Process testing with the MMC SW Final Testing and pre-acceptance

FULL REFURBISHMENT SERVICE ON CONVAC & SUSS FALCON MODULES
- This Falcon Developer Module has been in production for over 10 years
- The Module was so badly worn that the module needed full refurbishment
- All valves, tubes and fittings were exchanged
- The Developer Arm was rebuild with new stepper motors, spindles and slides and bearings
- The Module was completely stripped, decontaminated, rebuild and calibrated
- The MMC Software is very flexible and allows to take out a defective Module from the Process Flow, so the rest of the Falcon can continue to stay in production

FALCON DEVELOPER MODULE FULL REFURBISHMENT
Taking the module completely apart in different assembly groups. Preparing to exchange cables, tubing, valves. Taking out the electrical parts assemblies and the pneumatical assemblies. Stripping the module to it´s empty shell in order to clean and decontaminate the module.

KARL SUSS ACS 200 CLASSIC
We refurbish and repair Karl Suss ACS 200 Classic tracks and stand alone RC8 tools.
Over the years we have build up a large stock of spare parts and also modules such as RC8 Coater, Developer, HCV and MHU modules.
We refurbish and rebuild hotplates and coolplates and are able to offer improvements.
Video
KARL SUSS – SUSS MICROTEC
Contact
Need a hand with SUSS MICROTEC Equipment?
Tell us the tool, the fault and your timeline. We reply with an assessment, the parts we hold and what a repair or upgrade would take.