APEX SEMICONDUCTOR
Second Life for Photolithographic Machines
APEX Semiconductor supports since 1999 a wide range of Photo Equipment from OEMs who no longer exist (i.e. Convac-Fairchild, B.L.E. Laboratory Equipment, SSE (Sister Semiconductor Equipment), SVG (Silicon Valley Group), ATMsse, APT (Convac) or where the OEMs have simply ceased support due to the age of the systems.
services
spare parts
Massive stock of new and refurbished spare parts for discontinued photolithographic machines
Repair work
Repair incl. spare parts of Convac-Fairchild, B.L.E. Laboratory Equipment, SSE (Sister Semiconductor Equipment), SVG (Silicon Valley Group), ATMsse, APT (Convac)
technical service
Technical maintenance of operational photolithographic machines
upgrades
Upgrades of old but still functional and needed photolithographic machines to new technical requirements
optimization
Line performance optimization of photolithographic machines
utilization
Utilization and refurbishment of old photolithographic machines not needed for production or scheduled for replacement
why choose us
Full Service
Full lifecycle service by experienced technicians
Focus
Focus on discontinued photolithographic machines
Spare Parts
Large specialized spare part stock
Global Service
Global line services at customer locations
LOCATIONS
APEX Semiconductor - Germany
Photo Equipment from OEMs who no longer exist (i.e. Convac-Fairchild, B.L.E. Laboratory Equipment, SSE (Sister Semiconductor Equipment), SVG (Silicon Valley Group), ATMsse, APT (Convac) and where the OEMs have ceased support due to the age of the systems.
APEX Semiconductor - USA
KLA-Tencor Technical Support For 2100 Series Bright Field Tools
KLA-Tencor Models 21XX ISMIF, 2132, 2133, 2135, 2135XP, 2138, 2138XP, 2139, 25XX, 2552, ADC
For a wide range of Models we provide the following services and spare parts:
- Karl Suss ACS 200 Classic, Coater, Developer, Hotplate, Coolplate , VPO Tracks
- Karl Suss RC8 Standalone Coater, Hotplate Tools
- Suss Microtec Gamma 60 and 80, ACS 200+, Delta Coater, Developer or Table Top
- Fairchild / Convac / Suss Microtec Falcon Coater, Developer Hotplate, Coolplate, HMDS, VPO, Lift-Off
- Convac M6000 Coater, Developer, HMDS, Hotplate, Cleaner, Lift Off, Etcher etc.
- Convac M2000 Coater, Developer tracks and all other manual tools
- Convac manual standalone process machines
- Convac APT systems
- B.L.E. Gamma, Respect, Acrobat, Delta .
- SSE and ATMsse Maximus 804 , Opticoat, Optiwet Optihot
- SVG 90s Tracks and other SVG Tools, Coater, Developer, Hotplate, Coolplate,
- Semitek, Hamatech
- KLA 21xx
- Tool Installation, De-Installation, Tool Relocations
- System Audits, Performance baselines, Pre-Upgrade System Qualification
- Appraisals, Applications support
- Preventative Maintenance (6 Week PM, Quarterly, Six Month & Annual PM)
- Tier 3 & Tier 4 Technical Support, On-Site Escalation Support
- 2552 Wafer Defect Analysis
- Station Support
- Optics Verifications
- Stage Verifications and Repair
- Yield Data Integration & Network Troubleshooting
- ADC Processor & Managers supported
- 21XX Customer Operations Training and
Level 1 Service Maintenance Training
Level 1 / 2 Training includes Customer Operations and Preventive Maintenance Training
Level 3 – Level 4 Advanced Stage And Optics Alignment Training Strictly Reserved only for KLA-Tencor Personnel
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