Pumps & spare parts

Wafertec F30 Dispense Pumps

Overhaul, repair and maintenance for Wafertec F30 dispense pumps, backed by years of experience.

Overhaul

Pumps overhauled to run at their best.

Repair

Troubleshooting and repairs that keep downtime short.

Preventive maintenance

Maintenance that prolongs pump life.

Pumps & controllers

Refurbished F30 pumps and controllers on request.

Overhaul, repair and maintenance

In addition to our overhaul services, we also offer repairs and maintenance for Wafertec pumps. Our team of skilled technicians has extensive knowledge of these pumps and can troubleshoot any issues you may be experiencing. We carry a wide range of spare parts and can often complete repairs in a timely manner to minimize downtime. We also offer preventative maintenance services to help prolong the life of your Wafertec pumps.

Contact us today to learn more about how we can assist with your Wafertec pump needs.

More about our Wafertec pump repair service →

Wafertec F30 plastic part 1207098

Inside the F30

Wafertec F30 bellows spindle drive

Wafertec F30 bellows spindle drive

Wafertec F30 bellows

Wafertec F30 bellows

Request

Ask about Wafertec F30 pumps

Tell us the pump or part, your tool and the delivery location. We reply with availability and a quote.

+49 170 28 444 35
info@apex-semiconductor.com