Since 1999 · Germany & USA
Second life for photolithographic machines
Service, repair, upgrades and spare parts for coater and developer tracks whose manufacturers no longer exist or no longer support them.
1999
in business since
450+
successful projects
15,000+
spare parts in stock
400 m²
parts warehouse
Who we are
When the OEM is gone, we keep your line running
Since 1999, APEX Semiconductor has supported photo equipment from OEMs that no longer exist – Convac-Fairchild, B.L.E. Laboratory Equipment, SSE (Sister Semiconductor Equipment), SVG (Silicon Valley Group), ATMsse and APT (Convac) – and from OEMs that have ceased support because of the age of the systems.
Our technicians repair, service, upgrade and optimize these machines worldwide, backed by a large stock of new and pre-owned spare parts.
What we do
Full lifecycle service for legacy lithography tools
Spare parts
A large stock of new and refurbished spare parts for discontinued photolithographic machines.
Repair
Repairs including spare parts for Convac-Fairchild, B.L.E., SSE, SVG, ATMsse and APT (Convac) equipment.
Technical service
On-site troubleshooting, escalation support and maintenance of operational photolithographic machines.
Upgrades
Upgrades for older but still needed machines – including hardware redesigns without software changes.
Optimization
Line performance and process optimization for photolithographic machines.
Utilization
Refurbishment and re-use of photolithographic machines that are no longer needed.
Platforms we support
Deep expertise on discontinued OEM equipment
Convac
M2000 and M6000 coater/developer tracks, Falcon tracks, manual and table-top tools
SUSS MicroTec
Falcon, ACS 200 Plus, Gamma 60/80 and Delta coater/developer systems
B.L.E.
Gamma 60/80, Respect 600, Delta, Acrobat, manual spinners and hotplates
SSE / ATMSSE
Maximus 804 coater, developer and lift-off tracks, Opticoat, Optiwet, Optihot
SVG 90S
SVG 90 series tracks, coaters, developers, hotplates and coolplates
KLA-Tencor 21xx
Technical support for 2100 series bright-field inspection tools
Why APEX
A partner for the full life of your equipment
Full service
Full lifecycle service by experienced technicians.
Focus
Specialized in discontinued photolithographic machines.
Spare parts
A large, specialized spare parts stock.
Global service
Line services at customer locations worldwide.
Locations
Close to your fab – in Europe and the USA
Remseck, Germany · Headquarters
APEX Semiconductor GmbH
Danneckerweg 12, 71686 Remseck, Germany. Service, repair and upgrades for Convac, SUSS MicroTec, B.L.E., SSE and SVG equipment, plus our spare parts warehouse.
Stockton, California
APEX Semiconductor USA
Technical support for KLA-Tencor 2100 series bright-field tools: installation, preventive maintenance, Tier 3/4 support and training.
Support request
Ready to give your equipment a second life?
Tell us about your system and the problem – we will get back to you quickly.