SUSS MicroTec · B.L.E.

SUSS Gamma 60/80 service and spare parts

Full service, maintenance and spare parts for Gamma 60/80 coater/developer tracks from B.L.E. and SUSS MicroTec, with service contracts worldwide.

Full service

Service and maintenance of Gamma tracks.

Service contracts

Available worldwide.

Remote support

Online and telephone support.

Spare parts in stock

Boards, spin motors, chucks and chillers.

What we do on the Gamma 60/80

The Gamma was developed by B.L.E. Laboratory Equipment, which SUSS MicroTec acquired in 2002. We perform full service and maintenance for Gamma tracks, for example a coater/developer track with two hotplates, one HMDS hotplate and two storage coolplates. Call us if your tool shows problems you cannot explain.

  • Full service and maintenance of Gamma 60/80 tracks
  • Service contracts worldwide, with online and telephone support
  • Hotplate, coolplate and HMDS hotplate repair
  • Coater bowls, chucks and spin motors
  • SUSS-branded Julabo FL601 and FC600S chillers for the Gamma
SUSS Gamma coater/developer module

FAQ

Frequently asked questions

Do you offer service contracts for the Gamma?

Yes. Service contracts for Gamma tracks are available worldwide, with online and telephone support.

Do you have chillers for the Gamma?

Yes. We offer refurbished and tested SUSS-branded Julabo FL601 and FC600S chillers used with Gamma tracks.

Who made the Gamma originally?

The Gamma comes from B.L.E. Laboratory Equipment, which SUSS MicroTec acquired in 2002.

Tell us about your Gamma

Send us the track configuration, the fault and your timeline. We reply with an assessment, the parts we hold and a quote.

+49 170 28 444 35
info@apex-semiconductor.com