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Spare Parts, Service and Upgrades
Contact us if you need spare parts, technical service and line optimization
APEX Semiconductor - Germany
Photo Equipment from OEMs who no longer exist (i.e. Convac-Fairchild, B.L.E. Laboratory Equipment, SSE (Sister Semiconductor Equipment), SVG (Silicon Valley Group), ATMsse, APT (Convac) and where the OEMs have ceased support due to the age of the systems.
APEX Semiconductor - USA
KLA-Tencor Technical Support For 2100 Series Bright Field Tools
KLA-Tencor Models 21XX ISMIF, 2132, 2133, 2135, 2135XP, 2138, 2138XP, 2139, 25XX, 2552, ADC
For a wide range of Models we provide the following services and spare parts:
- Karl Suss ACS 200 Classic, Coater, Developer, Hotplate, Coolplate , VPO Tracks
- Karl Suss RC8 Standalone Coater, Hotplate Tools
- Suss Microtec Gamma 60 and 80, ACS 200+, Delta Coater, Developer or Table Top
- Fairchild / Convac / Suss Microtec Falcon Coater, Developer Hotplate, Coolplate, HMDS, VPO, Lift-Off
- Convac M6000 Coater, Developer, HMDS, Hotplate, Cleaner, Lift Off, Etcher etc.
- Convac M2000 Coater, Developer tracks and all other manual tools
- Convac manual standalone process machines
- Convac APT systems
- B.L.E. Gamma, Respect, Acrobat, Delta .
- SSE and ATMsse Maximus 804 , Opticoat, Optiwet Optihot
- SVG 90s Tracks and other SVG Tools, Coater, Developer, Hotplate, Coolplate,
- Semitek, Hamatech
- KLA 21xx
- Tool Installation, De-Installation, Tool Relocations
- System Audits, Performance baselines, Pre-Upgrade System Qualification
- Appraisals, Applications support
- Preventative Maintenance (6 Week PM, Quarterly, Six Month & Annual PM)
- Tier 3 & Tier 4 Technical Support, On-Site Escalation Support
- 2552 Wafer Defect Analysis
- Station Support
- Optics Verifications
- Stage Verifications and Repair
- Yield Data Integration & Network Troubleshooting
- ADC Processor & Managers supported
- 21XX Customer Operations Training and
Level 1 Service Maintenance Training
Level 1 / 2 Training includes Customer Operations and Preventive Maintenance Training
Level 3 – Level 4 Advanced Stage And Optics Alignment Training Strictly Reserved only for KLA-Tencor Personnel
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