Legacy equipment support
B.L.E. LABORATORY EQUIPMENT
Spare Parts, Service and Upgrades
Since 1993
Founded by Pirmin Muffler; part of SÜSS MicroTec since 2002.
Tool support
Gamma 60/80, Respect 600, Delta and Acrobat.
Controllers in stock
PMA, SMC, Metronix and Bautz spares.
Remanufacturing
Hotplates, coater bowls, chucks and hotplate pins.
B.L.E. LABORATORY EQUIPMENT Story
B.L.E. was founded by Mr. Pirmin Muffler in 1993 to provide capital equipment for manufacturing semiconductors and FPD’s. B.L.E. has developed three primary product lines since its inception – wafer and substrate processing equipment, wafer preparation equipment for chemical mechanical planarization (CMP), and multimedia substrate (CD and DVD) manufacturing equipment.
On 18 Jan 02 SÜSS MicroTec SE acquired BLE Laboratory Equipment GmbH.
B.L.E. LABORATORY EQUIPMENT Services
We support product lines such as:
- Gamma 60 / 80
- Respect 600
- Delta
- Acrobat
Manual Spinner and Hotplates
Most of these Tools are running with PMA PU 104-R controllers / 103, SMC EX 120 and EX 250 can bus modules, Metronix ARS 310-10 Spin Motor Controllers, Bautz Spin Motors… of which we hold a large stock. Also, we remanufacture Hotplates, Coater Bowls, chucks, Hotplate pins
Model pages: Delta
Contact
Need a hand with B.L.E. Equipment?
Tell us the tool, the fault and your timeline. We reply with an assessment, the parts we hold and what a repair or upgrade would take.