Reference projects

Equipment we service, refurbish and upgrade

Coater and developer tracks, spin processors and thermal modules from Convac, SUSS MicroTec, B.L.E., SSE/ATMSSE and SVG — kept running long after the original manufacturers stopped supporting them.

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Convac

M2000 and M6000 tracks, Falcon tracks, manual and table-top systems.

Karl Suss / SUSS MicroTec

Falcon, ACS 200 Plus, Gamma 60/80, Delta and Alta Spray; hotplate rebuilds.

B.L.E. Laboratory Equipment

Gamma 60/80, Respect 600, Delta and Acrobat lines, spinners and hotplates.

SSE / ATMSSE

Maximus 804 tracks, Optiwet, Opticoat and Optihot; station repair.

SVG 90S

SVG 90 series tracks, plus spare modules from our stock.

Wafertec F30 dispense pumps

Overhaul and exchange of Wafertec and Pribyl pumps.

How we work

From assessment to a running tool

Assessment

We inspect the tool on site or from your photos and fault description, then tell you honestly what is worth repairing.

Refurbishment

Modules are cleaned, worn parts replaced and tested — coater bowls, hotplates, dispense arms, robots, drives and boards.

Upgrades & relocation

Hardware upgrades without software changes where possible, plus de-installation, transport and re-installation.

Impressions

Machines and modules from our projects

Convac 301 coater with air barrier plate for 14-inch substrates Convac M2000 Coater Falcon coater SUSS Gamma coater/developer module SSE Maximus coater/developer Upgraded B.L.E. coater with air barrier plate and lifting pins for square substrates

Contact

Ready to give your equipment a second life?

Tell us the tool, the fault and your timeline. We reply with an assessment, the parts we hold and what a repair or upgrade would take.

+49 3221 2243 984
info@apex-semiconductor.com

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