Services
Service, repair and upgrades for legacy photolithography equipment
On-site and remote support, spare parts, refurbishment and upgrades for coater/developer tracks and process tools whose OEMs no longer exist or no longer support them.
On-site troubleshooting
Our technicians diagnose and fix problems directly at your fab.
On-site escalation service
Escalation support on site when a problem needs senior expertise.
Online support
Remote support for fast answers without waiting for a site visit.
Overhauls and refurbishment
Machines and subsystems such as robots, hot and cool plates and coater stations.
Parts repair
Repair of electrical, mechanical and pneumatic components.
Installation and de-installation
Installation and de-installation of process equipment.
Relocation
Relocation service for process equipment.
Process support and optimization
Support for your processes and optimization of line performance.
Source inspection
Inspection of equipment at the source before it is bought or shipped.
Upgrades
Hardware upgrades without software changes – for substrates up to 16", round or square.
Spare parts
A 400 m² stock of new and pre-owned parts, from spin motors to PCBs.
KLA-Tencor 21xx
Specialist service and spare parts for KLA-Tencor 21xx bright-field inspection tools.
Since 1999
When the OEM no longer helps, we do
Since August 1999, APEX Semiconductor has supported a wide range of photo equipment from OEMs that no longer exist – for example Convac-Fairchild, B.L.E. Laboratory Equipment, SSE (Sister Semiconductor Equipment), SVG (Silicon Valley Group), ATMsse and APT (Convac) – as well as systems whose OEMs have ceased support because of their age.
We keep these machines productive with on-site service, repairs, refurbishment and upgrades, backed by our own stock of new and pre-owned spare parts.
Equipment we service
Platforms and models we support
SUSS MicroTec / Karl Suss
- ACS 200 Classic: coater, developer, hotplate, coolplate and VPO tracks
- RC8 standalone coater and hotplate tools
- Gamma 60/80, ACS 200+ and Delta: coater, developer and table-top tools
- Falcon (Fairchild / Convac / SUSS): coater, developer, hotplate, coolplate, HMDS, VPO, lift-off
Convac
- M6000: coater, developer, HMDS, hotplate, cleaner, lift-off, etcher
- M2000 coater and developer tracks and manual tools
- Manual standalone process machines
- APT systems
B.L.E.
- Gamma, Respect, Acrobat and Delta
SSE / ATMsse
- Maximus 804
- Opticoat, Optiwet and Optihot
SVG
- SVG 90 series tracks
- Coater, developer, hotplate and coolplate tools
More platforms
- Semitek
- Hamatech
- KLA-Tencor 21xx
FAQ
Frequently asked questions
Which equipment do you service?
Photolithography equipment from Convac, SUSS MicroTec (Karl Suss), B.L.E., SSE/ATMsse, SVG, Semitek and Hamatech – mainly coater and developer tracks, hotplates, coolplates and related process tools – as well as KLA-Tencor 21xx inspection tools.
Do you offer on-site service?
Yes. We provide on-site troubleshooting and escalation service, installation, de-installation and relocation at customer locations worldwide, plus online support.
Can you supply spare parts for discontinued machines?
Yes. We keep a large stock of new and pre-owned spare parts, including spin motors and controllers, CPU units and PCBs. Browse our spare parts shop or send us a request.
Can older machines be upgraded?
Yes. With our experience on substrates from 2" and smaller up to 16", round or square, we can redesign hardware for upgrades without changing the machine software.
Where are you located?
Our headquarters and spare parts warehouse are in Remseck, Germany. KLA-Tencor 21xx support is provided by APEX Semiconductor USA in Stockton, California.
Specialist services
Repair services and used equipment
Spin coater repair
Spin motors, chucks, bowls and upgrades for Convac, SUSS, B.L.E. and SSE spin coaters.
Wafertec pump repair
Overhaul, repair and exchange of Wafertec F30 and Pribyl dispense pumps.
Used equipment
Refurbished Julabo chillers, ISEL robots and more.
Support request
Ready to give your aged equipment a second life?
Tell us about your system and the problem – we will get back to you quickly.