Type: Batchspray Acid for 300mm for 25 Wafers/Square Substrates
Year of manufacture: 2018
Dimensions (l/w/h): ca, 2000 x 1200 x 2000 mm
Weight(kg): estimated 1500 kg
Type of PLC: Beckhoff
General function: 12″ rotating batchspray machine for etching and cleaning with acids os bases (closed system). Currently the tools are set up for 12″ square substrates. The tool can be upgraded to process Wafers. The machines are very young and come from a pilot line. Excellent condition.
We have 2 systems for immediate sale. Both Siconnex Batchspray acid tools are fully functional an can be inspected in Austria after consultation.
If you have further questions about the history of the tools, please feel free to contact us via form or phone:
+49 170 2844435