Karl Suss · SUSS MicroTec

SUSS RC8 spin coater service and spare parts

Refurbishment, repair and spare parts for Karl Suss RC8 standalone spin coaters and RC8 modules in ACS 200 tracks.

Standalone RC8 tools

Refurbished and repaired.

RC8 modules in stock

Coater modules for RC8 and ACS 200.

Chucks

Including chucks for 6″ square substrates.

Hotplates

Hotplates and coolplates rebuilt.

What we do on the RC8

We refurbish and repair standalone RC8 spin coaters and RC8 modules in ACS 200 tracks. Over the years we have built up a large stock of RC8 spare parts and complete modules.

  • Refurbishment and repair of standalone RC8 spin coaters
  • RC8 coater modules from stock
  • Chucks, including chucks for 6″ square substrates
  • Spin motors and spin motor controllers
  • Hotplate and coolplate rebuilds
Chuck for 6″ square substrates (ACS 200 Classic / RC8)

FAQ

Frequently asked questions

Do you have RC8 modules in stock?

Yes. We hold RC8 coater modules as well as developer, HCV and MHU modules and many spare parts.

Can you supply chucks for square substrates?

Yes, for example chucks for 6″ square substrates for ACS 200 Classic and RC8 tools.

Do you repair RC8 spin motors?

Yes. We repair spin motors and spin motor controllers and hold spares in stock.

Tell us about your RC8

Send us the tool, the fault and your timeline. We reply with an assessment, the parts we hold and a quote.

+49 170 28 444 35
info@apex-semiconductor.com