Spare parts shop

Spare parts for legacy lithography equipment

Spare parts for Convac, SUSS MicroTec, B.L.E., SSE, SVG and other legacy lithography equipment. Search by OEM part number, model or keyword, or use the filters to narrow down by manufacturer, platform and condition.

Control Electronics & PCB Boards

PMA controller modules, Lippert/ISA boards, interface cards, power and control boards, PLC modules

446 parts

Motors, Drives & Motion Control

Spin motors, Metronix spin controllers, servo motors, motor drivers, encoders, belts

214 parts

Wafer Chucks, Inlays & Vacuum Parts

Vacuum chucks, wafer chucks, chuck inlays, centering parts, vacuum fittings, seals

17 parts

Coater & Spin-Coater Parts

Coater bowls, spin assemblies, dispense components, lids, splash guards, spinner accessories

45 parts

Developer, Wet Process & Chemical Handling

Developer parts, wet benches, pumps, valves, chemical lines, filters, manifolds, nozzles

35 parts

Hotplate, Coolplate & Thermal Parts

Hotplates, coolplates, heaters, temperature sensors, thermal pins, controllers, lift pins

37 parts

Pneumatics, Vacuum & Fluidics

Cylinders, solenoids, regulators, valves, vacuum pumps, fittings, hoses, flow components

23 parts

Chillers, Cooling & Temperature Control

Julabo chillers, chillers, refrigeration parts, cooling pumps, heat exchangers, temperature-control modules

15 parts

Mechanical Assemblies & Tooling

Covers, brackets, frames, pin assemblies, lift mechanisms, adapters, fixtures, service tools

1 part

Showing 1–24 of 830 results