Convac

Convac M2000 service, repair and spare parts

Service, repair and spare parts for Convac M2000 coater/developer tracks and standalone tools – long after Convac stopped supporting them.

Tracks and standalone tools

Coater/developer tracks and standalone M2000 tools.

Thermal modules

Hotplates and coolplates repaired and rebuilt.

Control boards

Old control boards and controllers repaired.

Spare parts in stock

Spin motors, chucks, robots and boards.

What we do on the Convac M2000

The M2000 is a high-throughput Convac system, for example as a double track with hotplate and coolplate. Wafer handling is pick and place, and the transport on the hotplates and coolplates is belt driven. We keep these tools running with repairs, refurbishment and parts from our own stock.

  • Troubleshooting and repair of M2000 tracks and standalone tools
  • Hotplate and coolplate repair, including the belt-driven transport
  • Refurbishment of coater and developer chambers and dispense arms
  • Repair of old Convac control boards and controllers
  • Spare parts such as spin motors, chucks and Kuhnke and Phytron electronics
Convac M2000 Coater

FAQ

Frequently asked questions

Do you still support the Convac M2000?

Yes. We repair and refurbish M2000 tracks and standalone tools and hold spare parts for them, although Convac was taken over by Karl Suss in 1999.

Can you repair M2000 control boards?

Yes. We repair old Convac control boards and controllers, and many boards are also in stock.

Where do you work?

We support customers worldwide, on site or from our workshop in Remseck am Neckar near Stuttgart, Germany.

Tell us about your Convac M2000

Send us the tool configuration, the fault and your timeline. We reply with an assessment, the parts we hold and a quote.

+49 170 28 444 35
info@apex-semiconductor.com