Showing all 13 results
CONVAC CSC1A BS Vacuum Controller ILFA Board COAT A4 Used Used CONVAC CSC1A BS vacuum controller PCB board with ILFA COAT A4 designation, removed from working industrial equipment. Ideal replacement part for CONVAC vacuum contactor control systems; visually inspected, not tested, sold as-is. C116
3″ Teflon Wafer Vacuum Chuck Insert for Convac M6000 Convac-3 Semiconductor ToolTeflon semiconductor wafer vacuum chuck insert for 6 inch wafers, labeled “CHUCK TEFLON 6″ CONVAC 3” and used on Convac M6000 / Convac-3 equipment. Round PTFE chuck plate suitable as a replacement or spare for wafer handling and processing tools, with visible storage marks…
Used industrial HMI operator panel with integrated display, function keys F1-F10 and numeric keypad, ideal replacement operator interface for CNC or machine control systems. Box: 059
CONVAC CDC1A BS Vacuum Controller Board CONVAC CDC1A BS vacuum controller PCB board associated with Convac medium-voltage vacuum contactor systems, carrying part label 302134 and mounted components including power resistors, relay/driver circuitry and plug-in connections. Suitable as a replacement or spare controller board in Convac installations; sold as used surplus, untested, ideal for parts, repair…
CONVAC CSC1A BS Vacuum Controller Board CONVAC CSC1A BS vacuum controller PCB board used with Convac medium-voltage vacuum contactor systems, fitted with Omron G2E-187P-M relay, DAC and driver circuitry. Europac-style plug-in controller card for Convac contactors; sold as used surplus, untested, ideal for parts, repair or replacement in installations requiring Convac CSC1A BS vacuum controller…
Convac VAK 5-1 Vacuum Valve Control PCB Board Used Convac VAK 5-1 industrial control PCB board, likely a vacuum or valve control module from Convac wafer processing or vacuum contactor systems, populated with multiple op-amps, transformers and relays; removed from working equipment and suitable as a spare or replacement board for maintaining legacy Convac installations…
CONVAC Module 6000 Series photo-lithographic process equipment meets the most stringent requirements of the submicron technology 1 Mega, 4 Mega, 16 Mega, 64 Mega
Professionally manufactured chuck developer (part D3-30-19, CONVAC-3, 62130) for wafer track or semiconductor process tools. Precision polymer/metal hybrid construction. Includes full disc with center hub, drive slot, and three mounting tabs. Suitable as a replacement part for OEM semiconductor track, spin, and wet process equipment. Factory-sealed in original packaging. Compatible with generic, OEM, and custom…
Cybor Photoresist Pump Refurbished Module 00511-05 Filter System Components Kit Professional semiconductor refurbished/rebuild components: Complete filter system module Model 00511-05 with integrated photoresist pump assembly components from Cybor Corporation. This is a refurbished internal pump assembly module (Pump Options 05116-01-OK) containing: (1) Inner pump head and rotor assembly with stepper motor drive coupling; (2) Multiple…
Hotplate Coolplate Spindle to drive pins up & down for Convac, Suss Microtec and SSE ATMsse Hotplates and coolplates. APEX often repairs hotplates on site but also as a repair job.
We have all spare parts for repair or refurbishing avaiable. We also repair and recover leacking coolplates.
Stepper motor board for Convac and SUSS MicroTec machines. In stock at APEX Semiconductor. Tell us your tool and the part number, and we reply with the condition, availability and a quote.
We have a large collection of Chucks from OEM Manufacturers. We are able to remanufacture chucks and Inlays from all Manufacturers.
We test our chucks with Vacuum and test them with wafers on maximum speed. We refurbish the chucks with new bushings.
We manufacture Chucks out of PEEK, Teflon, PE or POM. We also manufacture chuck out of Stainless Steel or Alumium coated with Teflon, Halar or any other coating.
Temperature controller for Convac and SUSS machines.
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