Cybor – Pump Controller Module – 527E / 2-610-022-086 – Photoresist pump controller-Used – 034228

Description

Cybor Controller Model 527E Pump Controller Module 2-610-022-086 Photoresist Semiconductor

Cybor pump controller module Model 527E, Part No. 2-610-022-086, Serial Number 034228.

Used photoresist pump control module for semiconductor photolithography applications. Enhanced 527E version with improved electronics architecture.

Manages precise photoresist and polyimide dispensing for Cybor 5000-series pump systems in track-based lithography equipment. Electronic control interface for pump actuation timing and pressure regulation.

Originally removed from operating semiconductor fab environment. Module only, pump not included.

Product Summary

The Cybor Model 527E (Part No. 2-610-022-086, Serial No. 034228) is an enhanced photoresist pump controller module for Cybor 5000-series photoresist dispensing systems used in semiconductor photolithography.

Key Specifications:

• Model Designation: 527E (enhanced/revised version of Model 527)

• Control Function: Manages precise photoresist and polyimide dispensing for track-based lithography equipment

• Application: Semiconductor photolithography and photoresist coating processes

• Interface: Electronic control module with pump actuation timing, pressure regulation, and suckback logic

• Compatibility: Works with Cybor 5000-series pump systems (models 5016, 5026, 5116, 5126, 5330, etc.)