Cybor Model 00511-03 Compact Stainless Steel Filter System – Professional-grade high-purity filtration component designed for semiconductor photoresist dispensing and chemical management applications. Features stainless steel construction with all wetted O-rings specified as Kalrez/Chemrez (advanced chemically-resistant elastomer) for superior compatibility with aggressive photoresist solvents and semiconductor-grade chemicals.
Compact cylindrical design with threaded connections suitable for inline pump system integration. Part of Cybor’s Model 511 filter assembly offering multiple filter configurations (up to 8 options). Compatible with Cybor M5000 series pumps, 5166 series photoresist pumps, and similar positive displacement pump systems.
Applications: Semiconductor wafer fabrication photolithography, photoresist chemical dispensing, high-purity laboratory filtration, microelectronics manufacturing.
Manufactured in San Jose, California by Cybor (now IDI Cybor, Teledyne Integrated Designs) – world leader in precision photochemical dispense technology for semiconductor industry.
Used condition, professionally deinstalled from fab equipment. Stainless housing in good condition with minor surface oxidation typical of industrial use. F
ilter media condition/replacement needs should be verified by end-user. Ideal for semiconductor equipment integration, spare parts, or laboratory system upgrades.
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