Iwaki – Pneumatic Bellows Pump – SB-4S-ML – Pneumatic bellows pump / Photoresist dispenser-Used – 07103324

Description

Iwaki SB-4S-ML Pneumatic Bellows Pump Photoresist Dispenser 15mL Semiconductor 07103324

Iwaki SB-4S-ML pneumatic bellows pump for precision photoresist dispensing in semiconductor manufacturing. 15 mL/stroke maximum discharge capacity, 0.05 MPa maximum discharge pressure.

Stainless steel (SUS304) pump head with PTFE bellows and Hastelloy C276 valve. ML version includes mechanical stopper for stroke adjustment and proximity switch for position detection.

Supply air pressure 0.15-0.4 MPa. Horizontal or vertical mountable. Serial Number 07103324.

Ideal for photolithography track systems and precision chemical dosing.

Removed from working fab environment.

Product Summary

The Iwaki SB-4S-ML (Serial No. 07103324) is a precision pneumatic bellows pump engineered for photoresist dispensing in semiconductor photolithography systems.

Product Specifications:

• Discharge capacity: 15 mL/stroke (rated max)

• Operating pressure: 0.05 MPa maximum discharge, 0.15–0.4 MPa supply air

• Wet-end construction: SUS304 stainless steel pump head, PTFE bellows (sealed), Hastelloy C276 valve for chemical resistance

• ML Configuration: Includes mechanical stopper dial for fine-tuning discharge volume and proximity switch (limit switch) for piston position detection

• Mounting flexibility: Can be installed horizontal or vertical

• Contamination-free design: Stainless/fluorine materials, minimal dead volume, welded bellows eliminate leakage

• Typical stroke rate: 2–150 SPM depending on air pressure and controller settings

• Mass: ~1.5 kg

Applications:
SB-series pumps are industry standard for semiconductor photolithography processes including photoresist coating, polyimide dispensing, and high-purity chemical metering in track systems.