Iwaki – Pneumatic Bellows Pump – SB-4SH-ML – Pneumatic bellows pump / Photoresist dispenser-Used – 09703985

Iwaki SB-4SH-ML Pneumatic Bellows Pump Photoresist Dispenser MFG 09703985 Semiconductor

Iwaki SB-4SH-ML pneumatic bellows pump for photoresist dispensing in semiconductor manufacturing. 15 mL/stroke max capacity, 0.05 MPa max pressure, stainless steel wetted parts, horizontal mount, with mechanical stopper and switch.

MFG No 09703985. Ideal for photolithography, track systems, and precision chemical dosing applications.

Business & Industrial > CNC, Metalworking & Manufacturing > Semiconductor & PCB Manufacturing > Semiconductor Manufacturing Equipment

The Iwaki SB-4SH-ML is a pneumatic bellows pump specifically designed for photoresist dispensing in semiconductor manufacturing processes.

Product Specifications

Based on technical documentation, the SB-4SH-ML features:

• Max discharge capacity: 15 mL/stroke

• Max discharge pressure: 0.05 MPa

• Wet-end materials: Stainless steel (SUS304) pump head, PTFE bellows, Hastelloy C276 valve

• Mounting orientation: Horizontal (H designation)

• Pneumatic cylinder type: ML (with mechanical stopper and switch for stroke adjustment and position detection)

• Supply air pressure: 0.15 to 0.4 MPa

• Dimensions (ML type): 142mm (A) × 39mm (B) × 84mm (C), 280mm overall length, 1.4 kg mass