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Description
The ATV is a tube furnace that can be used for oxidation, doping and anneals. Process in-liners are used for sensitive processes to prevent cross contamination. Currently the system can support wet/dry oxidation and annealing of 4″ wafers and pieces.
Low pressure processing is supported as well.
Additional information
| Brand | ATV |
|---|---|
| Location | Dillenburg – Germany |
| Manufacturer | ATV |
| Model | PEO 603 |
| Part condition | Used (untested) |
| Availability | In stock |