Repair service
Spin coater repair and maintenance
Repair, overhaul and upgrades for manual and automated spin coaters from Convac, SUSS MicroTec, B.L.E. and SSE, including tools the manufacturers no longer support.
Spin motors
Spin motors and spin motor controllers repaired, with spares in stock.
Chucks
Vacuum chucks for round and square substrates.
Bowls & dispense arms
Coater bowls and dispense arms rebuilt.
Upgrades
Air barrier plates and lifting pins for square substrates, 2″ to 16″.
Spin coaters we work on
- Convac manual spin coaters such as the 1001, 301 and 501
- Convac M2000 and M6000 coater modules
- SUSS MicroTec RC8, Delta and Gamma coaters
- B.L.E. manual spinners and Delta coaters
- SSE Opticoat for large square substrates
Spin motors, spin motor controllers, chucks and other spare parts come from our own stock, so many repairs are possible at short notice.
Process
How a repair works
Describe the spin coater
Send the manufacturer, model and the fault. Photos or a short video help.
Assessment and quote
We assess the fault on site or from your description and tell you honestly what is worth repairing.
Repair, upgrade and test
Worn parts are replaced, modules are rebuilt or upgraded, and the spin coater is tested.
FAQ
Questions about spin coater repair
Which spin coaters do you repair?
Manual and automated spin coaters from Convac, SUSS MicroTec, B.L.E. and SSE, including coater modules in coater/developer tracks.
Can you repair spin motors and their controllers?
Yes. We repair spin motors and spin motor controllers and hold spare motors and controllers in stock, for example from Metronix.
Can my spin coater be upgraded for square substrates?
Yes. We fit air barrier plates, lifting pins and chucks for square substrates. Hardware upgrades cover substrates from 2″ and smaller up to 16″, round or square, without software changes.
Do you work on site?
Yes. We offer on-site troubleshooting worldwide, and we refurbish modules in our workshop in Remseck am Neckar near Stuttgart.
Repair request
Tell us about your spin coater
Send us the manufacturer, model and the fault. We reply with an assessment and a quote.