Cybor Corporation (IDI Cybor) – Pump Module Assembly Kit 00511-05 – 00511-05 – Photoresist Pump Refurbished Module / Filter System Components-tested

Description

Cybor Photoresist Pump Refurbished Module 00511-05 Filter System Components Kit Professional

semiconductor refurbished/rebuild components: Complete filter system module Model 00511-05 with integrated photoresist pump assembly components from Cybor Corporation.

This is a refurbished internal pump assembly module (Pump Options 05116-01-OK) containing:

(1) Inner pump head and rotor assembly with stepper motor drive coupling;
(2) Multiple precision nozzles and dispense tips for photoresist/solvent applications;
(3) Filter cartridge assembly components (PFFE media, support structures);
(4) All wetted materials compatible with Emiliene Propylene/LENE (EPR) seals;
(5) Pressure relief and check valve components;
(6) Spring-loaded piston rod assembly.

This module is designed for field refurbishment/rebuild of existing Cybor pump units or as spare parts collection for equipment restoration specialists. Suitable for: SVG 8800/8900 track system maintenance, pump rebuilds, and replacement part supply for existing installations. Manufactured in San Jose, California by Cybor Corporation (now IDI Cybor).

Used condition. Recommended for experienced technicians or fab maintenance engineers familiar with Cybor pump service procedures. Component-level parts kit for advanced users.

Cybor Model 00511-05 Filter System Module​

This specialized refurbished module contains:

Primary Components:

• Pump Head Assembly: Inner rotor pack with precision stepper motor coupling interface

• Dispense Nozzle Array: Multiple precision tip configurations for photoresist, solvent, and specialty chemical dispensing

• Filter Media Pack: PFFE (polytetrafluoroethylene) filtration elements supporting 3-5 micron particle removal

• Seal Kit: All wetted o-rings using EPR (Ethylene Propylene Rubber) or Emiliene Propylene materials for chemical compatibility

Secondary Components:

• Pressure relief valve assembly (30-50 PSI relief setting)

• Check valve components (one-way flow control)

• Spring-loaded piston rod mechanism

• Inlet/outlet manifold interface fittings