SSE · ATMSSE
SSE Maximus 804 service and spare parts
Service, station repair and spare parts for SSE / ATMSSE Maximus 804 coater, developer and lift-off tracks.
3″ to 8″ wafers
Coater, developer and lift-off tracks.
Station repair
Coat, develop, hotplate and coolplate stations.
Robots
Genmark or Isel wafer handling robots.
Obsolete parts
PMA modules, Metronix controllers, spin motors.
What we do on the Maximus 804
The Maximus 804 is a coater/developer system with either a Genmark or an Isel robot, similar to the SUSS Gamma 60/80. It handles wafers from 3″ to 8″. Its closed cover chuck gives better uniformity on square substrates, and the open bowl coater has a stepper-motor-driven dispense arm. After the process, lifting pins hand the wafer back to the robot end effector.
- Repair and refurbishment of coat, develop, hotplate and coolplate stations
- Service of Genmark and Isel wafer handling robots
- Stepper-motor-driven dispense arms
- PMA controller modules, Metronix spin controllers and spin motors from stock
- Closed cover chucks for square substrates
SSE spare parts in stock
Parts for SSE and ATMSSE tools from our stock. Ask us if the part you need is not listed.
FAQ
Frequently asked questions
Which wafer sizes does the Maximus 804 handle?
The Maximus 804 handles wafers from 3″ to 8″. With its closed cover chuck it also gives better uniformity on square substrates.
Which robots does the Maximus 804 use?
Either a Genmark or an Isel wafer handling robot. We service both, and ISEL robots are sometimes available used.
Do you have spare parts for SSE tools?
Yes. Our stock includes PMA controller modules, Metronix spin controllers, spin motors and many obsolete parts.
Tell us about your Maximus 804
Send us the track configuration, the fault and your timeline. We reply with an assessment, the parts we hold and a quote.