Karl Suss · SUSS MicroTec

SUSS ACS 200 refurbishment, repair and spare parts

Refurbishment, repair and spare parts for Karl Suss ACS 200 Classic and ACS 200 Plus coater/developer tracks.

ACS modules

Refurbished to OEM standards.

Dispense arms

Hardware rebuilt and arm movements calibrated.

Modules in stock

RC8 coater, developer, HCV and MHU modules.

Tested

Process testing and pre-acceptance before delivery.

ACS 200 module refurbishment

We refurbish ACS modules to OEM standards. Where appropriate, all fittings and process valves are replaced. We rebuild the dispense arm hardware, exchange stepper motors and slides, re-tube and re-wire the module and calibrate the arm movements. The module is then process-tested with the MMC software, followed by final testing and pre-acceptance.

  • Refurbishment of ACS 200 Classic and ACS 200 Plus coater and developer modules
  • Replacement of fittings and process valves
  • Dispense arm rebuilds, stepper motors and slides, calibration
  • Hotplate and coolplate rebuilds, with improvements where they pay off
  • RC8 coater, developer, HCV and MHU modules from stock
Karl Suss ACS 200 Classic

FAQ

Frequently asked questions

How are ACS modules tested after refurbishment?

Each module is process-tested with the MMC software, then goes through final testing and pre-acceptance.

Do you have complete modules in stock?

Yes. We hold modules such as RC8 coater, developer, HCV and MHU modules, as well as many spare parts.

Do you support both ACS 200 Classic and ACS 200 Plus?

Yes. We refurbish and repair ACS 200 Classic tracks and ACS 200 Plus systems.

Tell us about your ACS 200

Send us the track version, the module and the fault. We reply with an assessment, the parts we hold and a quote.

+49 170 28 444 35
info@apex-semiconductor.com