Part category: Coater & Spin-Coater Parts

Coater bowls, spin assemblies, dispense components, lids, splash guards, spinner accessories

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Cybor Corporation (IDI Cybor) – Pump Module Assembly Kit 00511-05 – 00511-05 – Photoresist Pump Refurbished Module / Filter System Components-tested

Cybor Photoresist Pump Refurbished Module 00511-05 Filter System Components Kit Professional semiconductor refurbished/rebuild components: Complete filter system module Model 00511-05 with integrated photoresist pump assembly components from Cybor Corporation. This is a refurbished internal pump assembly module (Pump Options 05116-01-OK) containing: (1) Inner pump head and rotor assembly with stepper motor drive coupling; (2) Multiple…

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Integrated Designs / Teledyne IDI Cybor – Pumpless Pump Controller – 300-COM-CE / IDS300 – Integrated Dispense System Controller-Used – 033674

IDI Pumpless Pump Controller 300-COM-CE Model IDS300 Chemical Dispenser 2-300-014-U2 Semiconductor IDI Pumpless Pump Controller Model 300-COM-CE, Part No. 2-300-014-U2, REV. J-00, Serial No. 033674. Used integrated dispense system controller for semiconductor photolithography and chemical dispensing. Manages up to 4 dispense units with 3 independent dispense points each. Includes RS232/RS485 communications interface, 100-130 VAC 50/60…

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Cybor Corporation (IDI Cybor) – Pump Module Assembly Kit 00511-05 – 00511-05 – Photoresist Pump Refurbished Module / Filter System Components-tested