Spare parts
Spare parts for legacy lithography equipment
More than 800 used, surplus and refurbished parts for SUSS MicroTec, Convac, BLE, SSE and SVG coaters, developers, hotplates and spin processors. Search by part number, manufacturer or tool platform.
Control Electronics & PCB Boards
PMA controller modules, Lippert/ISA boards, interface cards, power and control boards, PLC modules
446 parts
Motors, Drives & Motion Control
Spin motors, Metronix spin controllers, servo motors, motor drivers, encoders, belts
214 parts
Wafer Chucks, Inlays & Vacuum Parts
Vacuum chucks, wafer chucks, chuck inlays, centering parts, vacuum fittings, seals
17 parts
Coater & Spin-Coater Parts
Coater bowls, spin assemblies, dispense components, lids, splash guards, spinner accessories
45 parts
Developer, Wet Process & Chemical Handling
Developer parts, wet benches, pumps, valves, chemical lines, filters, manifolds, nozzles
35 parts
Hotplate, Coolplate & Thermal Parts
Hotplates, coolplates, heaters, temperature sensors, thermal pins, controllers, lift pins
37 parts
Pneumatics, Vacuum & Fluidics
Cylinders, solenoids, regulators, valves, vacuum pumps, fittings, hoses, flow components
23 parts
Chillers, Cooling & Temperature Control
Julabo chillers, chillers, refrigeration parts, cooling pumps, heat exchangers, temperature-control modules
15 parts
Mechanical Assemblies & Tooling
Covers, brackets, frames, pin assemblies, lift mechanisms, adapters, fixtures, service tools
1 part
Browse by equipment
Parts by manufacturer and tool platform
Component brands
Browse by component manufacturer
Condition grades
What our condition labels mean
Every listing states the condition of the part. If you need more detail – photos, test records or the history of a part – just ask.
New surplus
Unused parts from surplus stock, often in the original packaging.
Refurbished
Overhauled and checked before sale; worn parts replaced where needed.
Tested used
Used parts from working equipment, function-tested before sale.
Used (untested)
Removed from equipment but not tested. Condition as described in the listing.
For parts / defective
Defective or incomplete – for repair, salvage or as a source of components.
Remanufactured
Rebuilt to original specification with worn components replaced.
Why APEX
Parts from people who service these tools
Search by part number
Type the OEM part number, model or a keyword – the search covers titles, descriptions and part numbers.
Clear condition grades
From new surplus to for-parts: you know what you get before you order.
Repair and exchange
Many modules can be repaired or exchanged instead of replaced. Our service team knows the tools.
Help with sourcing
Part not listed? Send us the part number – we often have more in stock than is online.
FAQ
Questions about spare parts
How do I find a part by its part number?
Enter the OEM part number in the search at the top of this page. The search checks product titles, descriptions and the stored part numbers. You can also browse by category, manufacturer or tool platform.
The part I need is not listed. Can you still help?
Yes. Only part of our stock is online, and we can often source parts from our network. Send us the part number, the tool type and a photo if possible.
Are the parts tested?
The condition is stated on every listing. “Tested used” parts were function-tested; “Used (untested)” parts were not. Ask us if you need details for a specific part.
What does “On request” mean?
The part is not immediately available or the price depends on the configuration. Send an inquiry and we will reply with availability and a quote.
Can you repair or exchange a defective module?
For many boards, motors, controllers and hotplates we offer repair or an exchange unit. Contact us with the part number and a description of the fault.
Contact
Can’t find your part?
Tell us the part number, tool and quantity. We check our stock and network and get back to you with availability and a quote.