B.L.E. · SUSS MicroTec

B.L.E. / SUSS Delta service and spare parts

Service, remanufacturing and spare parts for Delta coaters, developers and table-top tools from B.L.E. and SUSS MicroTec.

Coater and developer

Delta coaters, developers and table-top tools.

Controllers in stock

PMA, SMC, Metronix and Bautz spares.

Remanufacturing

Hotplates, coater bowls, chucks and hotplate pins.

Upgrades

Air barrier plates and lifting pins for square substrates.

What we do on the Delta

The Delta line comes from B.L.E. Laboratory Equipment, which SUSS MicroTec acquired in 2002. Most of these tools run with PMA PU 104-R and PU 103 controllers, SMC EX 120 and EX 250 CAN bus modules, Metronix ARS 310-10 spin motor controllers and Bautz spin motors – parts we hold in large numbers.

  • Service and repair of Delta coaters, developers and table-top tools
  • PMA controllers, SMC CAN bus modules and Metronix spin motor controllers from stock
  • Remanufacturing of hotplates, coater bowls, chucks and hotplate pins
  • Bautz spin motors
  • Upgrades with air barrier plates and lifting pins for square substrates
Upgraded B.L.E. coater with air barrier plate and lifting pins for square substrates

FAQ

Frequently asked questions

Which controllers do Delta tools use?

Most run with PMA PU 104-R and PU 103 controllers, SMC EX 120 and EX 250 CAN bus modules and Metronix ARS 310-10 spin motor controllers. We hold these in stock.

Can a Delta coater be upgraded for square substrates?

Yes. We have upgraded B.L.E. coaters with an air barrier plate and lifting pins for square substrates.

Do you remanufacture hotplates and coater bowls?

Yes. We remanufacture hotplates, coater bowls, chucks and hotplate pins.

Tell us about your Delta

Send us the tool, the fault and your timeline. We reply with an assessment, the parts we hold and a quote.

+49 170 28 444 35
info@apex-semiconductor.com