Cybor Corporation (IDI Cybor) – Stepper Motor Electrohydraulic Positive Displacement Pump – 5016C – Photoresist Dispense Pump-Used – 9426605

Cybor 5016C Photoresist Pump 18VDC 3.5A Stepper Motor Dispenser Professional semiconductor manufacturing equipment: Cybor Model 5016C Positive Displacement Photoresist Dispense Pump designed for SVG semiconductor coating/developing track systems. 18VDC power supply, 3.5A nominal current draw.

Stepper motor-driven electrohydraulic positive-displacement pump for precise, repeatable photochemical dispensing in semiconductor fabrication. Suitable for high-viscosity photoresist, solvents, developers, specialty chemicals. Viscosity range 1-3000 centipoise (cps), precision repeatability ±0.01mL typical. All wetted surfaces compatible with Teflon/Kalrez materials for chemical resistance.

Includes D-sub terminal connector interface for SVG track system integration. Patent No. 4,950,134 and 78,109,971. Manufactured San Jose, California by Cybor Corporation (now IDI Cybor).

Maintenance/Service Label: Date 24.9.2009 / JHu (professionally serviced and inspected September 2009). Used condition. Compatible with 1990s-2000s era SVG 8800, 8900 track equipment.

Requires external controller (not included). Ideal for fab maintenance departments, equipment restoration specialists, process control engineers.

Business & Industrial > Manufacturing & Metalworking > Semiconductor & PCB Equipment

Pump Specifications

• Model: Cybor 5016C

• Power: 18VDC, 3.5A

• Type: Stepper motor-driven electrohydraulic positive-displacement pump

• Patent Numbers: US 4,950,134 and 78,109,971

• Location: San Jose, California (Cybor Corporation, now operating as IDI Cybor)

• Viscosity: 1–3,000 centipoise (cps)

• Precision: ±0.01 mL repeatability

• Wetted Materials: Teflon-compatible, Kalrez seals

• Application: SVG 8800/8900 semiconductor track systems

Service History Assessment

The label “24.9.2009 / JHu” indicates documented professional service in September 2009. The abbreviation “Jäu kuivaana OK” (from the second label visible in images) suggests the unit passed inspection with desiccant storage recommendation. This 2009 maintenance log is older than the 2011 inspection on Serial 9525565, which may affect pricing expectations.