Cybor – Pump Controller Module – 527E / 2-610-022-086 – Photoresist pump controller-Used – 033670

Product Summary

The Cybor Model 527E (Part No. 2-610-022-086, Serial No. 034228) is an enhanced photoresist pump controller module for Cybor 5000-series photoresist dispensing systems used in semiconductor photolithography.

Key Specifications:

• Model Designation: 527E (enhanced/revised version of Model 527)

• Control Function: Manages precise photoresist and polyimide dispensing for track-based lithography equipment

• Application: Semiconductor photolithography and photoresist coating processes

• Interface: Electronic control module with pump actuation timing, pressure regulation, and suckback logic

• Compatibility: Works with Cybor 5000-series pump systems (models 5016, 5026, 5116, 5126, 5330, etc.)

Cybor Controller Model 527E Pump Controller Module 2-610-022-086 Photoresist Semiconductor

Cybor pump controller module Model 527E, Part No. 2-610-022-086, Serial Number 033670.

Used, defective photoresist pump control module for semiconductor photolithography applications.

Enhanced 527E version with improved electronics architecture. Manages precise photoresist and polyimide dispensing for Cybor 5000-series pump systems in track-based lithography equipment. Electronic control interface for pump actuation timing and pressure regulation.

Originally removed from operating semiconductor fab environment. Module only, pump not included.

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