Cybor – Pump Controller Module – 527E / 2-610-022-086 – Photoresist pump controller-Used – 030681

Cybor Controller Model 527E Pump Controller Module 2-610-022-086 Photoresist Semiconductor

Cybor pump controller module Model 527E, Part No. 2-610-022-086, Serial Number 030681.

Used photoresist pump control module for semiconductor photolithography applications.

Enhanced 527E version with improved electronics architecture. Manages precise photoresist and polyimide dispensing for Cybor 5000-series pump systems in track-based lithography equipment.

Electronic control interface for pump actuation timing and pressure regulation.

Originally removed from operating semiconductor fab environment. Module only, pump not included.

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