Cybor Corporation (IDI Cybor) / MACE Industries – Pump w/ Integrated Filter & Mass Flow Meter Assembly – 00511-01 / 801F-076 – Complete Photoresist Dispense & Flow Measurement System-Used – M201613 (MACE) / –

Cybor Photoresist Pump Complete Assembly w/ Filter System 00511-01 & MACE Mass Flow Meter 801F-076 Professional semiconductor manufacturing complete system assembly: Integrated Cybor photoresist dispense pump with attached Model 00511-01 filter system and MACE Model 801F-076 mass flow meter (Serial M201613).

This is a fully assembled, tested system typically used in SVG 8800/8900 series photoresist coating/developing track equipment. Components:

(1) Cybor electrohydraulic positive-displacement pump stepper motor-driven, 18VDC operation;

(2) Model 00511-01 integrated filter system – all wetted o-rings are Kalrez/Chemrez for chemical compatibility, particle filtration for photoresist and solvent applications;

(3) MACE Model 801F-076 cumulative mass flow meter with 15VDC 500mA operation, precision measurement for chemical consumption tracking and process control. Complete assembly with hoses, connectors, and control interface cabling.

Pump Options: 05116-01-OK. European CE certified (TUV Rheinland EN 60204). Pressure-rated 30-50 PSI typical. Suitable for high-viscosity photoresist, solvents, specialty semiconductor chemicals. Used condition. Ideal for fab equipment restoration, SVG track maintenance, process control system upgrades. Manufactured USA, Cybor Corporation (now IDI Cybor) and MACE Industries.

Business & Industrial > Manufacturing & Metalworking > Semiconductor & PCB Equipment

Cybor Pump Component

• Type: Stepper motor-driven electrohydraulic positive-displacement pump

• Voltage: 18VDC standard (with 3.5A capacity)

• Application: High-viscosity photoresist dispensing (1-3,000 cps range)

• Pump Options: 05116-01-OK (precision 0.01 mL repeatability)

Cybor Model 00511-01 Filter System​

• Type: Integrated particle filtration assembly

• Material Compatibility: All wetted surfaces use Kalrez/Chemrez o-rings

• Function: Pre-filtration of photoresist, solvents, and specialty chemicals before dispense

• Typical Micron Rating: 3-5 micron particle removal

• Pressure Rating: 30-50 PSI nominal

MACE Model 801F-076 Mass Flow Meter

• Model: 801F-076 (thermal or positive-displacement type)

• Serial Number: M201613

• Voltage: 15VDC, 500mA nominal

• Function: Cumulative volume measurement and precision flow control

• Integration: Direct integration with Cybor pump outlet, provides real-time consumption data