{"id":5319,"date":"2026-01-25T13:59:31","date_gmt":"2026-01-25T13:59:31","guid":{"rendered":"https:\/\/apex-semiconductor.de\/?post_type=product&#038;p=5319"},"modified":"2026-01-25T14:03:12","modified_gmt":"2026-01-25T14:03:12","slug":"cybor-pump-controller-module-527e-2-610-022-086-photoresist-pump-controller-used-033670","status":"publish","type":"product","link":"https:\/\/apex-semiconductor.de\/index.php\/produkt\/cybor-pump-controller-module-527e-2-610-022-086-photoresist-pump-controller-used-033670\/","title":{"rendered":"Cybor &#8211; Pump Controller Module &#8211; 527E \/ 2-610-022-086 &#8211; Photoresist pump controller-Used &#8211; 033670"},"content":{"rendered":"<h2 id=\"product-summary\" class=\"mb-2 mt-4 font-sans font-semimedium visRefresh2026Fonts:font-bold text-base first:mt-0 md:text-lg [hr+&amp;]:mt-4\">Product Summary<\/h2>\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\">The\u00a0<strong>Cybor Model 527E<\/strong>\u00a0(Part No. 2-610-022-086, Serial No. 034228) is an\u00a0<strong>enhanced photoresist pump controller module<\/strong> for Cybor 5000-series photoresist dispensing systems used in semiconductor photolithography.<\/p>\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Key Specifications:<\/strong><\/p>\n<ul class=\"marker:text-quiet list-disc\">\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Model Designation:<\/strong>\u00a0527E (enhanced\/revised version of Model 527)<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Control Function:<\/strong>\u00a0Manages precise photoresist and polyimide dispensing for track-based lithography equipment<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Application:<\/strong>\u00a0Semiconductor photolithography and photoresist coating processes<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Interface:<\/strong>\u00a0Electronic control module with pump actuation timing, pressure regulation, and suckback logic<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Compatibility:<\/strong>\u00a0Works with Cybor 5000-series pump systems (models 5016, 5026, 5116, 5126, 5330, etc.)<\/p>\n<\/li>\n<\/ul>\n<p>Cybor Controller Model 527E Pump Controller Module 2-610-022-086 Photoresist Semiconductor<\/p>\n<p>Cybor pump controller module Model 527E, Part No. 2-610-022-086, Serial Number 033670.<\/p>\n<p>Used, defective photoresist pump control module for semiconductor photolithography applications.<\/p>\n<p>Enhanced 527E version with improved electronics architecture. Manages precise photoresist and polyimide dispensing for Cybor 5000-series pump systems in track-based lithography equipment. Electronic control interface for pump actuation timing and pressure regulation.<\/p>\n<p>Originally removed from operating semiconductor fab environment. Module only, pump not included.<\/p>\n<p>Business &amp; Industrial &gt; CNC, Metalworking &amp; Manufacturing &gt; Semiconductor &amp; PCB Manufacturing &gt; Semiconductor Manufacturing Equipment<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Product Summary The\u00a0Cybor Model 527E\u00a0(Part No. 2-610-022-086, Serial No. 034228) is an\u00a0enhanced photoresist pump controller module for Cybor 5000-series photoresist dispensing systems used in semiconductor photolithography. Key Specifications: Model Designation:\u00a0527E (enhanced\/revised version of Model 527) Control Function:\u00a0Manages precise photoresist and polyimide dispensing for track-based lithography equipment Application:\u00a0Semiconductor photolithography and photoresist coating processes Interface:\u00a0Electronic control module [&hellip;]<\/p>\n","protected":false},"featured_media":5322,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"box":[281],"product_brand":[211],"product_cat":[23],"product_tag":[],"class_list":{"0":"post-5319","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"box-external","7":"product_brand-cybor","8":"product_cat-uncategorized","9":"ts_product_brand-cybor","11":"first","12":"instock","13":"taxable","14":"shipping-taxable","15":"product-type-simple"},"acf":[],"_links":{"self":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product\/5319","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/comments?post=5319"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media\/5322"}],"wp:attachment":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media?parent=5319"}],"wp:term":[{"taxonomy":"box","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/box?post=5319"},{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_brand?post=5319"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_cat?post=5319"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_tag?post=5319"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}