{"id":5304,"date":"2026-01-25T13:41:29","date_gmt":"2026-01-25T13:41:29","guid":{"rendered":"https:\/\/apex-semiconductor.de\/?post_type=product&#038;p=5304"},"modified":"2026-01-25T13:47:11","modified_gmt":"2026-01-25T13:47:11","slug":"cybor-pump-controller-module-527e-2-610-022-086-photoresist-pump-controller-used-034228","status":"publish","type":"product","link":"https:\/\/apex-semiconductor.de\/index.php\/produkt\/cybor-pump-controller-module-527e-2-610-022-086-photoresist-pump-controller-used-034228\/","title":{"rendered":"Cybor &#8211; Pump Controller Module &#8211; 527E \/ 2-610-022-086 &#8211; Photoresist pump controller-Used &#8211; 034228"},"content":{"rendered":"<p><em>Cybor Controller Model 527E Pump Controller Module 2-610-022-086 Photoresist Semiconductor<\/em><\/p>\n<p>Cybor pump controller module Model 527E, Part No. 2-610-022-086, Serial Number 034228.<\/p>\n<p>Used photoresist pump control module for semiconductor photolithography applications. Enhanced 527E version with improved electronics architecture.<\/p>\n<p>Manages precise photoresist and polyimide dispensing for Cybor 5000-series pump systems in track-based lithography equipment. Electronic control interface for pump actuation timing and pressure regulation.<\/p>\n<p>Originally removed from operating semiconductor fab environment. Module only, pump not included.<\/p>\n\n<h2 id=\"product-summary\" class=\"mb-2 mt-4 font-sans font-semimedium visRefresh2026Fonts:font-bold text-base first:mt-0 md:text-lg [hr+&amp;]:mt-4\">Product Summary<\/h2>\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\">The\u00a0<strong>Cybor Model 527E<\/strong>\u00a0(Part No. 2-610-022-086, Serial No. 034228) is an\u00a0<strong>enhanced photoresist pump controller module<\/strong>\u00a0for Cybor 5000-series photoresist dispensing systems used in semiconductor photolithography.<\/p>\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Key Specifications:<\/strong><\/p>\n<ul class=\"marker:text-quiet list-disc\">\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Model Designation:<\/strong>\u00a0527E (enhanced\/revised version of Model 527)<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Control Function:<\/strong>\u00a0Manages precise photoresist and polyimide dispensing for track-based lithography equipment<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Application:<\/strong>\u00a0Semiconductor photolithography and photoresist coating processes<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Interface:<\/strong>\u00a0Electronic control module with pump actuation timing, pressure regulation, and suckback logic<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Compatibility:<\/strong>\u00a0Works with Cybor 5000-series pump systems (models 5016, 5026, 5116, 5126, 5330, etc.)<\/p>\n<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>Cybor Controller Model 527E Pump Controller Module 2-610-022-086 Photoresist Semiconductor Cybor pump controller module Model 527E, Part No. 2-610-022-086, Serial Number 034228. Used photoresist pump control module for semiconductor photolithography applications. Enhanced 527E version with improved electronics architecture. Manages precise photoresist and polyimide dispensing for Cybor 5000-series pump systems in track-based lithography equipment. Electronic control&#8230;<\/p>\n","protected":false},"featured_media":5307,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":""},"box":[],"product_brand":[211],"product_cat":[23],"product_tag":[],"apx_part_category":[580],"class_list":["post-5304","product","type-product","status-publish","has-post-thumbnail","product_brand-cybor","product_cat-uncategorized","apx_part_category-coater-parts","first","instock","taxable","shipping-taxable","product-type-simple","entry","content-bg","loop-entry"],"acf":[],"_links":{"self":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product\/5304","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/comments?post=5304"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media\/5307"}],"wp:attachment":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media?parent=5304"}],"wp:term":[{"taxonomy":"box","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/box?post=5304"},{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_brand?post=5304"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_cat?post=5304"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_tag?post=5304"},{"taxonomy":"apx_part_category","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/apx_part_category?post=5304"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}