Cybor Photoresist Pump Complete Assembly w\/ Filter System 00511-01 & MACE Mass Flow Meter 801F-076 Professional semiconductor manufacturing complete system assembly: Integrated Cybor photoresist dispense pump with attached Model 00511-01 filter system and MACE Model 801F-076 mass flow meter (Serial M201613).<\/p>\n
This is a fully assembled, tested system typically used in SVG 8800\/8900 series photoresist coating\/developing track equipment. Components:<\/p>\n
(1) Cybor electrohydraulic positive-displacement pump stepper motor-driven, 18VDC operation;<\/p>\n
(2) Model 00511-01 integrated filter system – all wetted o-rings are Kalrez\/Chemrez for chemical compatibility, particle filtration for photoresist and solvent applications;<\/p>\n
(3) MACE Model 801F-076 cumulative mass flow meter with 15VDC 500mA operation, precision measurement for chemical consumption tracking and process control. Complete assembly with hoses, connectors, and control interface cabling.<\/p>\n
Pump Options: 05116-01-OK. European CE certified (TUV Rheinland EN 60204). Pressure-rated 30-50 PSI typical. Suitable for high-viscosity photoresist, solvents, specialty semiconductor chemicals. Used condition. Ideal for fab equipment restoration, SVG track maintenance, process control system upgrades. Manufactured USA, Cybor Corporation (now IDI Cybor) and MACE Industries.<\/p>\n
Business & Industrial > Manufacturing & Metalworking > Semiconductor & PCB Equipment<\/p>\n
Cybor Pump Component<\/strong><\/p>\n Type<\/strong>: Stepper motor-driven electrohydraulic positive-displacement pump<\/p>\n<\/li>\n Voltage<\/strong>: 18VDC standard (with 3.5A capacity)<\/p>\n<\/li>\n Application<\/strong>: High-viscosity photoresist dispensing (1-3,000 cps range)<\/p>\n<\/li>\n Pump Options<\/strong>: 05116-01-OK (precision 0.01 mL repeatability)<\/p>\n<\/li>\n<\/ul>\n Cybor Model 00511-01 Filter System<\/strong>\u200b<\/span><\/p>\n Type<\/strong>: Integrated particle filtration assembly<\/p>\n<\/li>\n Material Compatibility<\/strong>: All wetted surfaces use Kalrez\/Chemrez o-rings<\/p>\n<\/li>\n Function<\/strong>: Pre-filtration of photoresist, solvents, and specialty chemicals before dispense<\/p>\n<\/li>\n Typical Micron Rating<\/strong>: 3-5 micron particle removal<\/p>\n<\/li>\n Pressure Rating<\/strong>: 30-50 PSI nominal<\/p>\n<\/li>\n<\/ul>\n MACE Model 801F-076 Mass Flow Meter<\/strong><\/p>\n Model<\/strong>: 801F-076 (thermal or positive-displacement type)<\/p>\n<\/li>\n Serial Number<\/strong>: M201613<\/p>\n<\/li>\n Voltage<\/strong>: 15VDC, 500mA nominal<\/p>\n<\/li>\n Function<\/strong>: Cumulative volume measurement and precision flow control<\/p>\n<\/li>\n Integration<\/strong>: Direct integration with Cybor pump outlet, provides real-time consumption data<\/p>\n<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":" Cybor Photoresist Pump Complete Assembly w\/ Filter System 00511-01 & MACE Mass Flow Meter 801F-076 Professional semiconductor manufacturing complete system assembly: Integrated Cybor photoresist dispense pump with attached Model 00511-01 filter system and MACE Model 801F-076 mass flow meter (Serial M201613). This is a fully assembled, tested system typically used in SVG 8800\/8900 series photoresist […]<\/p>\n","protected":false},"featured_media":5140,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"box":[314],"product_brand":[211],"product_cat":[23],"product_tag":[],"class_list":["post-5138","product","type-product","status-publish","has-post-thumbnail","box-s053-svg-88-finland","product_brand-cybor","product_cat-uncategorized","ts_product_brand-cybor","first","instock","taxable","shipping-taxable","product-type-simple"],"acf":[],"_links":{"self":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product\/5138","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/comments?post=5138"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media\/5140"}],"wp:attachment":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media?parent=5138"}],"wp:term":[{"taxonomy":"box","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/box?post=5138"},{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_brand?post=5138"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_cat?post=5138"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_tag?post=5138"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}\n
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