{"id":4411,"date":"2025-09-19T16:28:12","date_gmt":"2025-09-19T16:28:12","guid":{"rendered":"https:\/\/apex-semiconductor.de\/?post_type=product&#038;p=4411"},"modified":"2025-09-19T16:28:12","modified_gmt":"2025-09-19T16:28:12","slug":"leybold-z401-dry-etcher-plasma-etch-rie-system-semiconductor-substrate-processing","status":"publish","type":"product","link":"https:\/\/apex-semiconductor.de\/index.php\/produkt\/leybold-z401-dry-etcher-plasma-etch-rie-system-semiconductor-substrate-processing\/","title":{"rendered":"Leybold Z401 Dry Etcher Plasma Etch\/RIE System &#8211; Semiconductor Substrate Processing"},"content":{"rendered":"<p>The Leybold Z401 is a professional plasma dry etcher (Trocken\u00e4tzer), typically used for semiconductor and microfabrication applications. The system supports reactive ion etching (RIE) for precise substrate patterning. Known for robust German engineering, the Z401 is a classic in research and small-scale production environments.<\/p>\n<p>Technical Summary:<\/p>\n<p>Category: Plasma dry etcher \/ RIE system<br \/>\nManufacturer: Leybold AG, Germany<br \/>\nModel: Z401<br \/>\nTypical Applications: Si\/SiO\u2082, metals, dielectrics, and compound semiconductors<br \/>\nChamber: Vacuum-compatible, designed for plasma\/reactive ion etching<br \/>\nControls: Integrated vacuum and plasma discharge control (may vary unit to unit)<br \/>\nPower and Gases: Configurable for standard etch gases (CF\u2084, O\u2082, Ar, etc.)<br \/>\nConnections: Standard high-vacuum flanges &#038; integrated process cabling<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The Leybold Z401 is a professional plasma dry etcher (Trocken\u00e4tzer), typically used for semiconductor and microfabrication applications. The system supports reactive ion etching (RIE) for precise substrate patterning. Known for robust German engineering, the Z401 is a classic in research and small-scale production environments. Technical Summary: Category: Plasma dry etcher \/ RIE system Manufacturer: Leybold [&hellip;]<\/p>\n","protected":false},"featured_media":0,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"box":[],"product_brand":[],"product_cat":[23],"product_tag":[],"class_list":{"0":"post-4411","1":"product","2":"type-product","3":"status-publish","5":"product_cat-uncategorized","7":"first","8":"instock","9":"taxable","10":"shipping-taxable","11":"product-type-simple"},"acf":[],"_links":{"self":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product\/4411","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/comments?post=4411"}],"wp:attachment":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media?parent=4411"}],"wp:term":[{"taxonomy":"box","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/box?post=4411"},{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_brand?post=4411"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_cat?post=4411"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_tag?post=4411"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}