{"id":1593,"date":"2023-11-16T13:13:58","date_gmt":"2023-11-16T13:13:58","guid":{"rendered":"https:\/\/apex-semiconductor.de\/?post_type=product&#038;p=1593"},"modified":"2024-07-10T06:26:39","modified_gmt":"2024-07-10T06:26:39","slug":"atv-peo-603","status":"publish","type":"product","link":"https:\/\/apex-semiconductor.de\/index.php\/produkt\/atv-peo-603\/","title":{"rendered":"ATV &#8211; PEO 603"},"content":{"rendered":"<p>The ATV is a tube furnace that can be used for oxidation, doping and anneals. Process in-liners are used for sensitive processes to prevent cross contamination. Currently the system can support wet\/dry oxidation and annealing of 4&#8243; wafers and pieces.<\/p>\n<p>Low pressure processing is supported as well.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The ATV is a tube furnace that can be used for oxidation, doping and anneals. Process in-liners are used for sensitive processes to prevent cross contamination. Currently the system can support wet\/dry oxidation and annealing of 4&#8243; wafers and pieces. Low pressure processing is supported as well.<\/p>\n","protected":false},"featured_media":1604,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":""},"box":[],"product_brand":[748],"product_cat":[41],"product_tag":[],"apx_part_category":[],"class_list":["post-1593","product","type-product","status-publish","has-post-thumbnail","product_brand-atv","product_cat-dillenburg-germany","pa_location-dillenburg-germany","pa_manufacturer-atv","pa_model-peo-603","first","instock","taxable","shipping-taxable","product-type-simple","entry","content-bg","loop-entry"],"acf":[],"_links":{"self":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product\/1593","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/comments?post=1593"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media\/1604"}],"wp:attachment":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media?parent=1593"}],"wp:term":[{"taxonomy":"box","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/box?post=1593"},{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_brand?post=1593"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_cat?post=1593"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_tag?post=1593"},{"taxonomy":"apx_part_category","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/apx_part_category?post=1593"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}