{"id":1593,"date":"2023-11-16T13:13:58","date_gmt":"2023-11-16T13:13:58","guid":{"rendered":"https:\/\/apex-semiconductor.de\/?post_type=product&#038;p=1593"},"modified":"2024-07-10T06:26:39","modified_gmt":"2024-07-10T06:26:39","slug":"atv-peo-603","status":"publish","type":"product","link":"https:\/\/apex-semiconductor.de\/index.php\/produkt\/atv-peo-603\/","title":{"rendered":"ATV &#8211; PEO 603"},"content":{"rendered":"<p>The ATV is a tube furnace that can be used for oxidation, doping and anneals. Process in-liners are used for sensitive processes to prevent cross contamination. Currently the system can support wet\/dry oxidation and annealing of 4&#8243; wafers and pieces.<\/p>\n<p>Low pressure processing is supported as well.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The ATV is a tube furnace that can be used for oxidation, doping and anneals. Process in-liners are used for sensitive processes to prevent cross contamination. Currently the system can support wet\/dry oxidation and annealing of 4&#8243; wafers and pieces. Low pressure processing is supported as well.<\/p>\n","protected":false},"featured_media":1604,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"box":[],"product_brand":[],"product_cat":[41],"product_tag":[],"class_list":{"0":"post-1593","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-dillenburg-germany","7":"pa_location-dillenburg-germany","8":"pa_manufacturer-atv","9":"pa_model-peo-603","11":"first","12":"instock","13":"taxable","14":"shipping-taxable","15":"product-type-simple"},"acf":[],"_links":{"self":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product\/1593","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/comments?post=1593"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media\/1604"}],"wp:attachment":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media?parent=1593"}],"wp:term":[{"taxonomy":"box","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/box?post=1593"},{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_brand?post=1593"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_cat?post=1593"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_tag?post=1593"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}