{"id":12709,"date":"2026-01-25T13:41:29","date_gmt":"2026-01-25T13:41:29","guid":{"rendered":"https:\/\/apex-semiconductor.de\/index.php\/produkt\/cybor-pump-controller-module-527e-2-610-022-086-photoresist-pump-controller-used-034228\/"},"modified":"2026-01-25T13:41:29","modified_gmt":"2026-01-25T13:41:29","slug":"cybor-pump-controller-module-527e-2-610-022-086-photoresist-pump-controller-used-034228","status":"publish","type":"product","link":"https:\/\/apex-semiconductor.de\/de\/index.php\/produkt\/cybor-pump-controller-module-527e-2-610-022-086-photoresist-pump-controller-used-034228\/","title":{"rendered":"Cybor &#8211; Pumpencontroller-Modul &#8211; 527E \/ 2-610-022-086 &#8211; Fotolackpumpen-Controller-gebraucht &#8211; 034228"},"content":{"rendered":"<p><em>Cybor Controller Model 527E Pumpencontroller-Modul 2-610-022-086 Fotolack Halbleiter<\/em><\/p>\n<p>Cybor Pumpencontroller-Modul Model 527E, Teile-Nr. 2-610-022-086, Seriennummer 034228.<\/p>\n<p>Gebrauchtes Fotolackpumpen-Steuermodul f\u00fcr Anwendungen in der Halbleiter-Fotolithografie. Erweiterte Version 527E mit verbesserter Elektronikarchitektur.<\/p>\n<p>Steuert die pr\u00e4zise Dosierung von Fotolack und Polyimid f\u00fcr Cybor Pumpensysteme der Serie 5000 in trackbasierten Lithografieanlagen. Elektronische Steuerschnittstelle f\u00fcr Pumpenbet\u00e4tigungs-Timing und Druckregelung.<\/p>\n<p>Urspr\u00fcnglich aus einer laufenden Halbleiter-Fab-Umgebung ausgebaut. Nur Modul, Pumpe nicht enthalten.<\/p>\n<h2 id=\"product-summary\" class=\"mb-2 mt-4 font-sans font-semimedium visRefresh2026Fonts:font-bold text-base first:mt-0 md:text-lg [hr+&amp;]:mt-4\">Produkt\u00fcbersicht<\/h2>\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\">Das <strong>Cybor Model 527E<\/strong> (Teile-Nr. 2-610-022-086, Serien-Nr. 034228) ist ein <strong>erweitertes Fotolackpumpen-Controller-Modul<\/strong> f\u00fcr Cybor Fotolack-Dosiersysteme der Serie 5000 in der Halbleiter-Fotolithografie.<\/p>\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Wichtige Spezifikationen:<\/strong><\/p>\n<ul class=\"marker:text-quiet list-disc\">\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Modellbezeichnung:<\/strong> 527E (erweiterte\/\u00fcberarbeitete Version des Model 527)<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Steuerfunktion:<\/strong> Steuert die pr\u00e4zise Dosierung von Fotolack und Polyimid f\u00fcr trackbasierte Lithografieanlagen<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Anwendung:<\/strong> Halbleiter-Fotolithografie und Fotolack-Beschichtungsprozesse<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Schnittstelle:<\/strong> Elektronisches Steuermodul mit Pumpenbet\u00e4tigungs-Timing, Druckregelung und R\u00fccksauglogik (Suckback)<\/p>\n<\/li>\n<li class=\"py-0 my-0 prose-p:pt-0 prose-p:mb-2 prose-p:my-0 [&amp;&gt;p]:pt-0 [&amp;&gt;p]:mb-2 [&amp;&gt;p]:my-0\" style=\"box-sizing: border-box; scrollbar-color: initial; scrollbar-width: initial; --tw-border-spacing-x: 0; --tw-border-spacing-y: 0; --tw-translate-x: 0; --tw-translate-y: 0; --tw-rotate: 0; --tw-skew-x: 0; --tw-skew-y: 0; --tw-scale-x: 1; --tw-scale-y: 1; --tw-scroll-snap-strictness: proximity; --tw-ring-offset-width: 0px; --tw-ring-offset-color: #fff; --tw-ring-color: rgb(59 130 246 \/ .5); --tw-ring-offset-shadow: 0 0 #0000; --tw-ring-shadow: 0 0 #0000; --tw-shadow: 0 0 #0000; --tw-shadow-colored: 0 0 #0000; margin-top: 0px; margin-bottom: 0px; padding-inline-start: 0.375em; padding-top: 0px; padding-bottom: 0px; border: 0px solid oklch(var(--foreground-subtler-color));\">\n<p class=\"my-2 [&amp;+p]:mt-4 [&amp;_strong:has(+br)]:inline-block [&amp;_strong:has(+br)]:pb-2\"><strong>Kompatibilit\u00e4t:<\/strong> Funktioniert mit Cybor Pumpensystemen der Serie 5000 (Modelle 5016, 5026, 5116, 5126, 5330 usw.)<\/p>\n<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>Cybor Controller Model 527E Pumpencontroller-Modul 2-610-022-086 Fotolack Halbleiter Cybor Pumpencontroller-Modul Model 527E, Teile-Nr. 2-610-022-086, Seriennummer 034228. Gebrauchtes Fotolackpumpen-Steuermodul f\u00fcr Anwendungen in der Halbleiter-Fotolithografie. Erweiterte Version 527E mit verbesserter Elektronikarchitektur. Steuert die pr\u00e4zise Dosierung von Fotolack und Polyimid f\u00fcr Cybor Pumpensysteme der Serie 5000 in trackbasierten Lithografieanlagen. Elektronische Steuerschnittstelle f\u00fcr Pumpenbet\u00e4tigungs-Timing und Druckregelung. Urspr\u00fcnglich aus einer&#8230;<\/p>\n","protected":false},"featured_media":12710,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":""},"box":[],"product_brand":[211],"product_cat":[521],"product_tag":[],"apx_part_category":[581],"class_list":["post-12709","product","type-product","status-publish","has-post-thumbnail","product_brand-cybor","product_cat-allgemein","apx_part_category-coater-parts-de","first","instock","taxable","shipping-taxable","product-type-simple","entry","content-bg","loop-entry"],"acf":[],"_links":{"self":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product\/12709?lang=de"}],"collection":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product?lang=de"}],"about":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/types\/product?lang=de"}],"replies":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/comments?lang=de&post=12709"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media\/12710?lang=de"}],"wp:attachment":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media?lang=de&parent=12709"}],"wp:term":[{"taxonomy":"box","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/box?lang=de&post=12709"},{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_brand?lang=de&post=12709"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_cat?lang=de&post=12709"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/product_tag?lang=de&post=12709"},{"taxonomy":"apx_part_category","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/apx_part_category?lang=de&post=12709"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}