{"id":772,"date":"2021-12-02T10:12:25","date_gmt":"2021-12-02T10:12:25","guid":{"rendered":"https:\/\/apex-semiconductor.com\/?p=772"},"modified":"2022-02-01T19:28:16","modified_gmt":"2022-02-01T19:28:16","slug":"pva-tepla-giga-690","status":"publish","type":"post","link":"https:\/\/apex-semiconductor.de\/index.php\/2021\/12\/02\/pva-tepla-giga-690\/","title":{"rendered":"PVA TePLA GIGA 690"},"content":{"rendered":"\n<p>We are selling here a GIGA 690 from PVA TePLA. <\/p>\n\n\n\n<p>The GIGA 690 is a MICROWAVE PLASMA SYSTEM. Further information:<\/p>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"process-chamber\">PROCESS CHAMBER<\/h4>\n\n\n\n<ul class=\"wp-block-list\"><li>Material Aluminum<\/li><li>Volume 91 liters<\/li><li>Inner dimensions 450 x 450 x 450 mm<\/li><li>No RF- electrodes inside chamber<\/li><\/ul>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"vacuum-system\">VACUUM SYSTEM<\/h4>\n\n\n\n<ul class=\"wp-block-list\"><li>Vacuum connection DN 63 ISO K<\/li><li>Process gas control 2 gas channels standard,<\/li><li>each with MFC and solenoid valve<\/li><li>Base pressure Approx. 2 x 10-2 mbar<\/li><li>Process pressure Approx. 0.2\u20132 mbar<\/li><li>Evacuation time Approx. 1 minute<\/li><li>Vacuum gauge Capacitance manometer,<\/li><li>10-2 to 10 mbar<\/li><li>Venting Solenoid valve<\/li><\/ul>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"performance-data\">PERFORMANCE DATA<\/h4>\n\n\n\n<ul class=\"wp-block-list\"><li>Uptime &gt;95%<\/li><li>MTBF &gt;500 h<\/li><li>MTTR &lt;2 h<\/li><\/ul>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"system-control\">SYSTEM CONTROL<\/h4>\n\n\n\n<ul class=\"wp-block-list\"><li>Hardware PC based system controller<\/li><li>10,4\u2033 monitor, GUI<\/li><li>Light Tower system status r\/g\/y<\/li><li>Software Realtime Operating System QNX<\/li><li>Manual and automatic system control<\/li><li>multiple recipe storage<\/li><li>Process recipe up to 100 recipes<\/li><li>with 1-10 steps each<\/li><li>System selftest routine,<\/li><li>warnings error message dialog<\/li><li>Soft- and hardware safety interlocks,<\/li><li>optical plasma intensity monitoring<\/li><\/ul>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"supplies\">SUPPLIES<\/h4>\n\n\n\n<ul class=\"wp-block-list\"><li>Electricity 230 V, single-phase, 15 A, 50\/60 Hz<\/li><li>Process gas 1\/4\u201c Swagelok connector,<\/li><li>input pressure 1\u20132 bar<\/li><li>Compressed air 1\/4\u201c Swagelok connector,<\/li><li>input pressure 4\u20136 bar<\/li><\/ul>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"plasma-source\">PLASMA SOURCE<\/h4>\n\n\n\n<ul class=\"wp-block-list\"><li>Microwave Generator<\/li><li>Frequency 2.45 GHz<\/li><li>Adjustable magnetron, air-cooled,<\/li><li>proprietary antenna and coupling geometry<\/li><li>Power 0\u20131.000 W<\/li><\/ul>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"dimensions\">DIMENSIONS<\/h4>\n\n\n\n<ul class=\"wp-block-list\"><li>W\/H\/D Approx. 1.050 x 1.750 x 800 mm<\/li><li>Weight 195 kg (system only, excluding pump)<\/li><\/ul>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"options\">OPTIONS<\/h4>\n\n\n\n<ul class=\"wp-block-list\"><li>Pumping system Vacuum pump system comprising<\/li><li>rotary vane pump or combination of<\/li><li>rotary vane pump and 250 m3\/h<\/li><li>(145 cfm) rootsblower,<\/li><li>400 V, 3 phase, 32 A max.<\/li><li>Rotary platform Aluminum, 400 mm \u00d8<\/li><li>Gas channels 3\u20134<\/li><li>ECR setup<\/li><\/ul>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"related-applications\">RELATED APPLICATIONS:<\/h4>\n\n\n\n<ul class=\"wp-block-list\"><li>Photoresist Ashing<\/li><li>SU8 Ashing<\/li><\/ul>\n\n\n\n<p>The GIGA 690 was 4 years in production and is in a realy good condition. Year of manuafcture mid 2015 and taken out of production in early 2019. <\/p>\n\n\n\n<p>The Machine is currently crated as can be seen, but can easily be prepared for inspection. The location is in Germany. For further information please contact us.<br><\/p>\n\n\n\n<figure class=\"wp-block-gallery has-nested-images columns-default is-cropped wp-block-gallery-1 is-layout-flex wp-block-gallery-is-layout-flex\">\n<figure class=\"wp-block-image size-large\"><img decoding=\"async\" data-id=\"775\" src=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/12\/3F11C391-1-1024x485.jpg\" alt=\"\" class=\"wp-image-775\"\/><\/figure>\n<\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"756\" src=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/1F2C14C1-2-1024x756.jpg\" alt=\"\" class=\"wp-image-818\" srcset=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/1F2C14C1-2-1024x756.jpg 1024w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/1F2C14C1-2-300x222.jpg 300w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/1F2C14C1-2-768x567.jpg 768w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/1F2C14C1-2-1536x1135.jpg 1536w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/1F2C14C1-2-2048x1513.jpg 2048w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/1F2C14C1-2-16x12.jpg 16w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/1F2C14C1-2-600x443.jpg 600w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large is-resized\"><img decoding=\"async\" src=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/CC0DF7C0-2-523x1024.jpg\" alt=\"\" class=\"wp-image-823\" width=\"830\" height=\"1625\"\/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img decoding=\"async\" width=\"1024\" height=\"807\" src=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/A1E4FDD0-2-1024x807.jpg\" alt=\"\" class=\"wp-image-822\" srcset=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/A1E4FDD0-2-1024x807.jpg 1024w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/A1E4FDD0-2-300x237.jpg 300w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/A1E4FDD0-2-768x605.jpg 768w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/A1E4FDD0-2-1536x1211.jpg 1536w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/A1E4FDD0-2-2048x1615.jpg 2048w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/A1E4FDD0-2-15x12.jpg 15w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2022\/02\/A1E4FDD0-2-600x473.jpg 600w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>We are selling here a GIGA 690 from PVA TePLA. The GIGA 690 is a MICROWAVE PLASMA SYSTEM. Further information: PROCESS CHAMBER Material Aluminum Volume 91 liters Inner dimensions 450 x 450 x 450 mm No RF- electrodes inside chamber VACUUM SYSTEM Vacuum connection DN 63 ISO K Process gas control 2 gas channels standard, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[1],"tags":[],"class_list":["post-772","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"acf":[],"_links":{"self":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/posts\/772","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/comments?post=772"}],"version-history":[{"count":3,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/posts\/772\/revisions"}],"predecessor-version":[{"id":826,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/posts\/772\/revisions\/826"}],"wp:attachment":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media?parent=772"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/categories?post=772"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/tags?post=772"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}