{"id":503,"date":"2021-10-23T18:20:32","date_gmt":"2021-10-23T18:20:32","guid":{"rendered":"http:\/\/apexsemiconductor.fossatech.eu\/?page_id=503"},"modified":"2021-10-24T09:26:02","modified_gmt":"2021-10-24T09:26:02","slug":"services","status":"publish","type":"page","link":"https:\/\/apex-semiconductor.de\/index.php\/services\/","title":{"rendered":"Services"},"content":{"rendered":"\n
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Services<\/p>\n\n\n\n

Service, repair and upgrades for legacy photolithography equipment<\/h1>\n\n\n\n

On-site and remote support, spare parts, refurbishment and upgrades for coater\/developer tracks and process tools whose OEMs no longer exist or no longer support them.<\/p>\n\n\n\n

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Request support<\/a><\/div>\n\n\n\n
Browse spare parts<\/a><\/div>\n<\/div>\n\n\n\n
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On-site troubleshooting<\/h3>\n\n\n\n

Our technicians diagnose and fix problems directly at your fab.<\/p>\n<\/div><\/div>\n\n\n\n

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On-site escalation service<\/h3>\n\n\n\n

Escalation support on site when a problem needs senior expertise.<\/p>\n<\/div><\/div>\n\n\n\n

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Online support<\/h3>\n\n\n\n

Remote support for fast answers without waiting for a site visit.<\/p>\n<\/div><\/div>\n\n\n\n

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Overhauls and refurbishment<\/h3>\n\n\n\n

Machines and subsystems such as robots, hot and cool plates and coater stations.<\/p>\n<\/div><\/div>\n\n\n\n

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Parts repair<\/h3>\n\n\n\n

Repair of electrical, mechanical and pneumatic components.<\/p>\n<\/div><\/div>\n\n\n\n

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Installation and de-installation<\/h3>\n\n\n\n

Installation and de-installation of process equipment.<\/p>\n<\/div><\/div>\n\n\n\n

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Relocation<\/h3>\n\n\n\n

Relocation service for process equipment.<\/p>\n<\/div><\/div>\n\n\n\n

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Process support and optimization<\/h3>\n\n\n\n

Support for your processes and optimization of line performance.<\/p>\n<\/div><\/div>\n\n\n\n

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Source inspection<\/h3>\n\n\n\n

Inspection of equipment at the source before it is bought or shipped.<\/p>\n<\/div><\/div>\n\n\n\n

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Upgrades<\/h3>\n\n\n\n

Hardware upgrades without software changes \u2013 for substrates up to 16", round or square.<\/p>\n<\/div><\/div>\n\n\n\n

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Spare parts<\/h3>\n\n\n\n

A 400 m\u00b2 stock of new and pre-owned parts, from spin motors to PCBs.<\/p>\n<\/div><\/div>\n\n\n\n

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KLA-Tencor 21xx<\/h3>\n\n\n\n

Specialist service and spare parts for KLA-Tencor 21xx bright-field inspection tools.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/section>\n\n\n\n

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Since 1999<\/p>\n\n\n\n

When the OEM no longer helps, we do<\/h2>\n\n\n\n

Since August 1999, APEX Semiconductor has supported a wide range of photo equipment from OEMs that no longer exist \u2013 for example Convac-Fairchild, B.L.E. Laboratory Equipment, SSE (Sister Semiconductor Equipment), SVG (Silicon Valley Group), ATMsse and APT (Convac) \u2013 as well as systems whose OEMs have ceased support because of their age.<\/p>\n\n\n\n

We keep these machines productive with on-site service, repairs, refurbishment and upgrades, backed by our own stock of new and pre-owned spare parts.<\/p>\n\n\n\n

More about APEX<\/a><\/p>\n<\/div><\/div>\n\n\n\n

\"SSE<\/figure>\n<\/div><\/div>\n<\/div><\/section>\n\n\n\n
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Equipment we service<\/p>\n\n\n\n

Platforms and models we support<\/h2>\n\n\n\n
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SUSS MicroTec \/ Karl Suss<\/a><\/h3>\n\n\n\n