{"id":428,"date":"2021-10-23T16:23:34","date_gmt":"2021-10-23T16:23:34","guid":{"rendered":"http:\/\/apexsemiconductor.fossatech.eu\/?page_id=428"},"modified":"2026-09-21T07:16:59","modified_gmt":"2026-09-21T07:16:59","slug":"sse","status":"publish","type":"page","link":"https:\/\/apex-semiconductor.de\/index.php\/sse\/","title":{"rendered":"SSE \/ ATMSSE"},"content":{"rendered":"\n<div class=\"wp-block-group apx-home apx-oem-page\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<section data-apx-video=\"86816274\" class=\"wp-block-group apx-hero apx-hero--compact apx-dark apx-hero-facts\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-inner\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<p class=\"apx-eyebrow wp-block-paragraph\">Legacy equipment support<\/p>\n\n\n\n<h1 class=\"wp-block-heading apx-h1\">SSE \/ ATMSSE<\/h1>\n\n\n\n<p class=\"apx-lead wp-block-paragraph\">Spare Parts, Service and Upgrades<\/p>\n\n\n\n<div class=\"wp-block-buttons apx-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button apx-btn-primary\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/apex-semiconductor.de\/index.php\/spareparts\/\">Browse spare parts<\/a><\/div>\n\n\n\n<div class=\"wp-block-button apx-btn-ghost\"><a class=\"wp-block-button__link wp-element-button\" href=\"#contact\">Talk to us<\/a><\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-group apx-grid-3 apx-fact-tiles\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-card apx-ico-tools\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Maximus 804<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Coater\/developer and lift-off tracks for 3\u2033 to 8\u2033 wafers.<\/p>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-card apx-ico-crosshairs\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Opticoat<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Coating of large square substrates up to 16\u2033 and larger.<\/p>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-card apx-ico-sync\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Station repair<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Coat, develop, hotplate and coolplate stations.<\/p>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-card apx-ico-boxes\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Obsolete parts<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">PMA modules, Metronix spin controllers and spin motors.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/section>\n\n\n\n<section class=\"wp-block-group apx-section\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-inner\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-grid-2\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-card\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">SSE Story<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">SSE designs, manufactures, and distributes leading-edge manufacturing equipment for the semiconductor, Telecom \/ Optoelectronik markets and Flat Panel Display (FPD).<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Through innovative engineering and a thorough knowledge of the semiconductor manufacturing process, SSE is able to deliver standard and customized solutions that other capital equipment manufacturers cannot.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">SSE`s products fall into three categories:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Semi-Automatic Wafer and Substrate Processing Equipment (for laboratories)<\/li>\n\n\n\n<li>Automated Photoresist Processing Equipment<\/li>\n\n\n\n<li>Wafer Mounting and Wafer Preparation Equipment<\/li>\n<\/ul>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-card\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">SSE Services<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">We service various SSE Sister Semiconductor Equipment GmbH \/ ATM SSE machines worldwide:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Maximus 804 Coater- Developer and Lift-Off Tracks<\/li>\n\n\n\n<li>Optiwet<\/li>\n\n\n\n<li>Opticoat<\/li>\n\n\n\n<li>Optihot<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">We repair and refurbish all stations like coat, develop, hotplate and coolplate stations.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Our large stock of spare parts consists of PMA Controller Modules, Metronix Spin Controllers, Spin Motors and a large variety of obsolete parts.<\/p>\n\n\n\n<p class=\"apx-more wp-block-paragraph\"><a href=\"https:\/\/apex-semiconductor.de\/index.php\/spin-coater-repair\/\">Spin coater repair \u2192<\/a><\/p>\n\n\n\n<p class=\"apx-more apx-model-links wp-block-paragraph\">Model pages: <a href=\"https:\/\/apex-semiconductor.de\/index.php\/sse-maximus-804\/\">SSE Maximus 804<\/a><\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/section>\n\n\n\n<section class=\"wp-block-group apx-section apx-paper\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-inner\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h2 class=\"wp-block-heading apx-h2\">SSE Projects<\/h2>\n\n\n\n<div class=\"wp-block-group apx-media-list\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-media-row\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<figure class=\"wp-block-image size-large apx-img\"><img loading=\"lazy\" decoding=\"async\" width=\"169\" height=\"300\" src=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/image005-169x300-1.jpg\" alt=\"Maximus 804 Coater Developer System with either Genmark Robot or Isel Robot.\" class=\"wp-image-437\" srcset=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/image005-169x300-1.jpg 169w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/image005-169x300-1-7x12.jpg 7w\" sizes=\"auto, (max-width: 169px) 100vw, 169px\" \/><\/figure>\n\n\n\n<div class=\"wp-block-group apx-col\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Maximus 804 Coater Developer System with either Genmark Robot or Isel Robot.<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">This system is similar to the Gamma 60\/80 from Suss Microtec. The Maximus can handle wafers from 3\u2033 to 8\u2033. With its Closed Cover Chuck a better uniformity on square substrates can be achieved.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-media-row\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<figure class=\"wp-block-image size-large apx-img\"><img loading=\"lazy\" decoding=\"async\" width=\"225\" height=\"300\" src=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/Maximus-Coater-Developer-_4537_1024-225x300-1.jpg\" alt=\"Open Bowl Coater with Stepper Motor Driven Dispense Arm.\" class=\"wp-image-438\" srcset=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/Maximus-Coater-Developer-_4537_1024-225x300-1.jpg 225w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/Maximus-Coater-Developer-_4537_1024-225x300-1-9x12.jpg 9w\" sizes=\"auto, (max-width: 225px) 100vw, 225px\" \/><\/figure>\n\n\n\n<div class=\"wp-block-group apx-col\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Open Bowl Coater with Stepper Motor Driven Dispense Arm.<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">The lifting pins transfer the wafer after process end back to the robots endeffector.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-media-row\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<figure class=\"wp-block-image size-large apx-img\"><img loading=\"lazy\" decoding=\"async\" width=\"225\" height=\"300\" src=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/SSE-Optiwet-Etcher-225x300-1.jpg\" alt=\"Optiwet Developer, Etcher, Cleaner System for large Substrates\" class=\"wp-image-446\" srcset=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/SSE-Optiwet-Etcher-225x300-1.jpg 225w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/SSE-Optiwet-Etcher-225x300-1-9x12.jpg 9w\" sizes=\"auto, (max-width: 225px) 100vw, 225px\" \/><\/figure>\n\n\n\n<div class=\"wp-block-group apx-col\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Optiwet Developer, Etcher, Cleaner System for large Substrates<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Manual Load. Stepper Motor Driven Dispense arms.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-media-row\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<figure class=\"wp-block-image size-large apx-img\"><img loading=\"lazy\" decoding=\"async\" width=\"225\" height=\"300\" src=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/Spin-750-mm-IMG_4319_1024-225x300-1.jpg\" alt=\"SSE Opticoat 75\" class=\"wp-image-441\" srcset=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/Spin-750-mm-IMG_4319_1024-225x300-1.jpg 225w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/Spin-750-mm-IMG_4319_1024-225x300-1-9x12.jpg 9w\" sizes=\"auto, (max-width: 225px) 100vw, 225px\" \/><\/figure>\n\n\n\n<div class=\"wp-block-group apx-col\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">SSE Opticoat 75<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">The machines are for large square substrate coating for up to 16 \u201c or larger.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">The machine has a servo motor driven Air Barrier Plate that closes in on the chuck to allow for better coating results similar to the Gyrset effect from Suss Microtec.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">The dispense arm is programable, but in most FABs not used.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-media-row\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<figure class=\"wp-block-image size-large apx-img\"><img loading=\"lazy\" decoding=\"async\" width=\"225\" height=\"300\" src=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/Optiwet-ST-30-MG_4491_1024-225x300-1.jpg\" alt=\"Optiwet Process Chamber\u00a0\" class=\"wp-image-447\" srcset=\"https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/Optiwet-ST-30-MG_4491_1024-225x300-1.jpg 225w, https:\/\/apex-semiconductor.de\/wp-content\/uploads\/2021\/10\/Optiwet-ST-30-MG_4491_1024-225x300-1-9x12.jpg 9w\" sizes=\"auto, (max-width: 225px) 100vw, 225px\" \/><\/figure>\n\n\n\n<div class=\"wp-block-group apx-col\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Optiwet Process Chamber\u00a0<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Optiwet Process Chamber with 2 Dispense arms and various nozzles for DI water, cleaning or etching media, N2 or CDA dry spin. Backside Rinse is also available. The Waste Management of the Optiwet is also integrated to separate DI water and process media.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-video-card\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-col\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<p class=\"apx-eyebrow wp-block-paragraph\">Video<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">SSE \/ ATMSSE<\/p>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-buttons apx-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button apx-btn-primary\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/vimeo.com\/229203572\" target=\"_blank\" rel=\"noopener\">Watch on Vimeo \u2197<\/a><\/div>\n<\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/section>\n\n\n\n<section id=\"contact\" class=\"wp-block-group apx-section apx-dark apx-cta\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-inner apx-split apx-split-45\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wp-block-group apx-col\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<p class=\"apx-eyebrow wp-block-paragraph\">Contact<\/p>\n\n\n\n<h2 class=\"wp-block-heading apx-h2\">Need a hand with SSE Equipment?<\/h2>\n\n\n\n<p class=\"apx-body wp-block-paragraph\">Tell us the tool, the fault and your timeline. We reply with an assessment, the parts we hold and what a repair or upgrade would take.<\/p>\n\n\n\n<p class=\"apx-contact wp-block-paragraph\"><a href=\"tel:+491702844435\">+49 170 28 444 35<\/a><br><a href=\"mailto:info@apex-semiconductor.com\">info@apex-semiconductor.com<\/a><\/p>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group apx-form-card\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<div class=\"wpcf7 no-js\" id=\"wpcf7-f9199-o1\" lang=\"en-US\" dir=\"ltr\" data-wpcf7-id=\"9199\">\n<div class=\"screen-reader-response\"><p role=\"status\" aria-live=\"polite\" aria-atomic=\"true\"><\/p> <ul><\/ul><\/div>\n<form action=\"\/index.php\/wp-json\/wp\/v2\/pages\/428#wpcf7-f9199-o1\" method=\"post\" class=\"wpcf7-form init\" aria-label=\"Contact form\" novalidate=\"novalidate\" data-status=\"init\">\n<fieldset class=\"hidden-fields-container\"><input type=\"hidden\" name=\"_wpcf7\" value=\"9199\" \/><input type=\"hidden\" name=\"_wpcf7_version\" value=\"6.1.7\" \/><input type=\"hidden\" name=\"_wpcf7_locale\" value=\"en_US\" \/><input type=\"hidden\" name=\"_wpcf7_unit_tag\" value=\"wpcf7-f9199-o1\" \/><input type=\"hidden\" name=\"_wpcf7_container_post\" value=\"0\" \/><input type=\"hidden\" name=\"_wpcf7_posted_data_hash\" value=\"\" \/>\n<\/fieldset>\n<span class=\"apx-hp\" aria-hidden=\"true\" style=\"position:absolute!important;left:-10000px!important;top:auto!important;width:1px!important;height:1px!important;overflow:hidden!important\"><label>Website<input type=\"text\" name=\"apx_website\" value=\"\" tabindex=\"-1\" autocomplete=\"off\"><\/label><\/span><input type=\"hidden\" name=\"apx_ts\" value=\"1790692962.f95550798c6dd0bc\"><p><label> Name *<br \/>\n<span class=\"wpcf7-form-control-wrap\" data-name=\"your-name\"><input size=\"40\" maxlength=\"400\" class=\"wpcf7-form-control wpcf7-text wpcf7-validates-as-required\" autocomplete=\"name\" aria-required=\"true\" aria-invalid=\"false\" value=\"\" type=\"text\" name=\"your-name\" \/><\/span> <\/label>\n<\/p>\n<p><label> Email *<br \/>\n<span class=\"wpcf7-form-control-wrap\" data-name=\"your-email\"><input size=\"40\" maxlength=\"400\" class=\"wpcf7-form-control wpcf7-email wpcf7-validates-as-required wpcf7-text wpcf7-validates-as-email\" autocomplete=\"email\" aria-required=\"true\" aria-invalid=\"false\" value=\"\" type=\"email\" name=\"your-email\" \/><\/span> <\/label>\n<\/p>\n<p><label> Message *<br \/>\n<span class=\"wpcf7-form-control-wrap\" data-name=\"your-message\"><textarea cols=\"40\" rows=\"10\" maxlength=\"2000\" class=\"wpcf7-form-control wpcf7-textarea wpcf7-validates-as-required\" aria-required=\"true\" aria-invalid=\"false\" name=\"your-message\"><\/textarea><\/span> <\/label>\n<\/p>\n<div class=\"wpcf7-turnstile cf-turnstile\" data-sitekey=\"0x4AAAAAAFADJY3-JEafpyF2\" data-response-field-name=\"_wpcf7_turnstile_response\"><\/div>\n<p><input class=\"wpcf7-form-control wpcf7-submit has-spinner\" type=\"submit\" value=\"Submit\" \/>\n<\/p><div class=\"wpcf7-response-output\" aria-hidden=\"true\"><\/div>\n<\/form>\n<\/div>\n\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/section>\n<\/div><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Legacy equipment support SSE \/ ATMSSE Spare Parts, Service and Upgrades Maximus 804 Coater\/developer and lift-off tracks for 3\u2033 to 8\u2033 wafers. Opticoat Coating of large square substrates up to 16\u2033 and larger. Station repair Coat, develop, hotplate and coolplate stations. Obsolete parts PMA modules, Metronix spin controllers and spin motors. SSE Story SSE designs,&#8230;<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_kad_post_transparent":"","_kad_post_title":"hide","_kad_post_layout":"fullwidth","_kad_post_sidebar_id":"","_kad_post_content_style":"unboxed","_kad_post_vertical_padding":"hide","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"class_list":["post-428","page","type-page","status-publish","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/pages\/428","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/comments?post=428"}],"version-history":[{"count":5,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/pages\/428\/revisions"}],"predecessor-version":[{"id":471,"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/pages\/428\/revisions\/471"}],"wp:attachment":[{"href":"https:\/\/apex-semiconductor.de\/index.php\/wp-json\/wp\/v2\/media?parent=428"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}