{"id":273,"date":"2021-10-23T10:22:37","date_gmt":"2021-10-23T10:22:37","guid":{"rendered":"http:\/\/apexsemiconductor.fossatech.eu\/?page_id=273"},"modified":"2026-09-21T07:16:59","modified_gmt":"2026-09-21T07:16:59","slug":"convac","status":"publish","type":"page","link":"https:\/\/apex-semiconductor.de\/index.php\/convac\/","title":{"rendered":"CONVAC"},"content":{"rendered":"\n
\n
\n
\n

Legacy equipment support<\/p>\n\n\n\n

Convac<\/h1>\n\n\n\n

Spare Parts, Service and Upgrades<\/p>\n\n\n\n

\n
Browse spare parts<\/a><\/div>\n\n\n\n
Talk to us<\/a><\/div>\n<\/div>\n\n\n\n
\n
\n

Since 1968<\/h3>\n\n\n\n

Over 3,000 machines built until Karl Suss bought Convac in 1999.<\/p>\n<\/div><\/div>\n\n\n\n

\n

High-volume fabs<\/h3>\n\n\n\n

Convacs serviced in Taiwan, Korea and the USA.<\/p>\n<\/div><\/div>\n\n\n\n

\n

Process upgrades<\/h3>\n\n\n\n

Upgrades for existing Convac machines.<\/p>\n<\/div><\/div>\n\n\n\n

\n

Refurbishing<\/h3>\n\n\n\n

Chambers, hotplates, dispense arms, robots and pumps.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/section>\n\n\n\n

\n
\n
\n
\n

Convac Story<\/h3>\n\n\n\n

Convac was founded in 1968 and manufactured over 3000 machines until 1999 when Convac was purchased by Karl Suss. There are still quite a few Convacs in Production.<\/p>\n<\/div><\/div>\n\n\n\n

\n

Convac Services<\/h3>\n\n\n\n

We have serviced Convacs in high volume FABs in Taiwan, Korea and USA.<\/p>\n\n\n\n

Over the years we have progressed from a pure service oriented company to a specialist adding process upgrades to existing machines.<\/p>\n\n\n\n

Other Corner stones are refurbishing and remanufacturing of Coater\/Developer Chambers, Hotplates, Dispense Arms, Handling Robots and resist pumps.<\/p>\n\n\n\n

Customers with special requests to upgrade, refurbish or repair their old Convac are welcome to contact us.<\/p>\n\n\n\n

Spin coater repair \u2192<\/a><\/p>\n\n\n\n

Model pages: Convac M2000<\/a> \u00b7 Convac M6000<\/a><\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/section>\n\n\n\n

\n
\n

Tools and projects<\/h2>\n\n\n\n
\n
\n
\"Convac<\/figure>\n\n\n\n
\n

M2000 Coater \u2013 Developer Tracks or Standalone Tools.<\/h3>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n
\n
\"M6000<\/figure>\n\n\n\n
\n

M6000 Coater-Developer-Lift-Off Tracks<\/h3>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n
\n
\"Falcon<\/figure>\n\n\n\n
\n

Falcon Coater Developer Tracks<\/h3>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n
\n
\"APEX<\/figure>\n\n\n\n
\n

Our Stock includes various spare parts like Seidel WKs Controllers, IPD Process boards, Abakus PCBs for the Falcon Systems, Kuhnke boards, Phytron Power Supplies, F9 Spin Motors, Chucks, Hotplates, Coater Modules, Elevators, Frogleg robots, Genmark Robots, endeffectors. We repair old control boards and controllers.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n

\n
\"Convac<\/figure>\n\n\n\n
\n

Convac M6000<\/h3>\n\n\n\n

Convac M6000 GaAs Double Coater with 2 Hotplates and 1 Coolplate. Year of Manufacture 1993<\/strong><\/p>\n\n\n\n