{"id":12577,"date":"2026-09-22T09:02:08","date_gmt":"2026-09-22T09:02:08","guid":{"rendered":"https:\/\/apex-semiconductor.de\/index.php\/delta\/"},"modified":"2026-09-22T09:02:08","modified_gmt":"2026-09-22T09:02:08","slug":"delta","status":"publish","type":"page","link":"https:\/\/apex-semiconductor.de\/index.php\/delta\/","title":{"rendered":"B.L.E. \/ SUSS Delta"},"content":{"rendered":"\n
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B.L.E. \u00b7 SUSS MicroTec<\/p>\n\n\n\n

B.L.E. \/ SUSS Delta service and spare parts<\/h1>\n\n\n\n

Service, remanufacturing and spare parts for Delta coaters, developers and table-top tools from B.L.E. and SUSS MicroTec.<\/p>\n\n\n\n

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Request support<\/a><\/div>\n\n\n\n
All B.L.E. equipment<\/a><\/div>\n<\/div>\n\n\n\n
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Coater and developer<\/h3>\n\n\n\n

Delta coaters, developers and table-top tools.<\/p>\n<\/div><\/div>\n\n\n\n

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Controllers in stock<\/h3>\n\n\n\n

PMA, SMC, Metronix and Bautz spares.<\/p>\n<\/div><\/div>\n\n\n\n

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Remanufacturing<\/h3>\n\n\n\n

Hotplates, coater bowls, chucks and hotplate pins.<\/p>\n<\/div><\/div>\n\n\n\n

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Upgrades<\/h3>\n\n\n\n

Air barrier plates and lifting pins for square substrates.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/section>\n\n\n\n

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What we do on the Delta<\/h2>\n\n\n\n

The Delta line comes from B.L.E. Laboratory Equipment, which SUSS MicroTec acquired in 2002. Most of these tools run with PMA PU 104-R and PU 103 controllers, SMC EX 120 and EX 250 CAN bus modules, Metronix ARS 310-10 spin motor controllers and Bautz spin motors \u2013 parts we hold in large numbers.<\/p>\n\n\n\n