{"id":12552,"date":"2026-09-22T09:01:49","date_gmt":"2026-09-22T09:01:49","guid":{"rendered":"https:\/\/apex-semiconductor.de\/index.php\/convac-m6000\/"},"modified":"2026-09-22T09:01:49","modified_gmt":"2026-09-22T09:01:49","slug":"convac-m6000-service","status":"publish","type":"page","link":"https:\/\/apex-semiconductor.de\/index.php\/convac-m6000-service\/","title":{"rendered":"Convac M6000"},"content":{"rendered":"\n
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Convac<\/p>\n\n\n\n

Convac M6000 service, repair and spare parts<\/h1>\n\n\n\n

Service, repair and spare parts for Convac M6000 coater, developer and lift-off tracks \u2013 including calibration and fine tuning of complete systems.<\/p>\n\n\n\n

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Request support<\/a><\/div>\n\n\n\n
All Convac equipment<\/a><\/div>\n<\/div>\n\n\n\n
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Coater, developer, lift-off<\/h3>\n\n\n\n

M6000 tracks in all three configurations.<\/p>\n<\/div><\/div>\n\n\n\n

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Calibration<\/h3>\n\n\n\n

Complete systems calibrated and fine tuned.<\/p>\n<\/div><\/div>\n\n\n\n

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Robots and handling<\/h3>\n\n\n\n

Frogleg indexer robots and carrier indexers.<\/p>\n<\/div><\/div>\n\n\n\n

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Spare parts in stock<\/h3>\n\n\n\n

Hotplates, chucks, spin motors and boards.<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/section>\n\n\n\n

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What we do on the Convac M6000<\/h2>\n\n\n\n

We have worked on M6000 tracks in many configurations, for example a GaAs double coater with two hotplates and one coolplate built in 1993, and a special coater\/developer track with two hotplates, an HMDS stack, two coolplates, three frogleg indexer robots and two carrier indexers. On that track all pneumatic functions were out of order and the movements were too fast or too slow. We calibrated and fine tuned the tool, and it went back into production.<\/p>\n\n\n\n