Cybor 5016C Photoresist Dispense Pump 18VDC 3.5A Stepper Motor Professional semiconductor manufacturing equipment: Cybor Model 5016C Positive Displacement Photoresist Dispense Pump for SVG semiconductor coating/developing track systems.
18VDC power supply, 3.5A maximum current draw. Stepper motor-driven electrohydraulic positive-displacement pump system for precise photochemical dispensing.
Suitable for high-viscosity photoresist, solvents, developers, and specialty chemicals in semiconductor fabrication applications. Viscosity range 1-3000 centipoise (cps), precision repeatability ±0.01mL typical. All wetted surfaces feature Teflon-compatible materials for chemical resistance. Includes terminal connector interface for SVG track system integration. Patent No. 4,950,134 and 78,109,971.
Manufactured in San Jose, California by Cybor Corporation (now IDI Cybor). Maintenance/Service Label: Huollettu 29.8.2011 / J. Huntala (serviced/inspected August 2011). Used condition, sold as-is for parts, repair, or restoration. Compatible with 1990s-2000s era SVG 8800, 8900 track equipment. Requires external controller (not included). Ideal for fab maintenance, equipment restoration, or process control specialists.
Business & Industrial > Manufacturing & Metalworking > Semiconductor & PCB Equipment
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Model: Cybor 5016C
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Series: Stepper motor-driven electrohydraulic positive-displacement pump
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Power: 18VDC, 3.5A nominal
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Patent Numbers: 4,950,134 and 78,109,971
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Manufacturing Location: San Jose, California, USA
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Viscosity Range: 1–3,000 centipoise (cps)
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Precision: Repeatability ±0.01 mL typical
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Application: SVG 8800/8900 series semiconductor photoresist coating/developing tracks
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Compatibility: All wetted surfaces use Teflon/Kalrez materials for chemical compatibility
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Service History: Documented maintenance label dated 29 August 2011 by J. Huntala, indicating professional service center inspection and refurbishment
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