Cybor Corporation (IDI Cybor) / MACE – Positive Displacement Electrohydraulic Photoresist Pump / Cumulative Mass Flowmeter – 5016C / – – Photoresist Dispense Pump / Mass Flow Meter Assembly-Used – – / 971737

Cybor 5016C Photoresist Pump 18VDC 3.5A with MACE Cumulative Mass Flow Meter Professional semiconductor manufacturing equipment:

1) Cybor Model 5016C Positive Displacement Photoresist Dispense Pump – 18VDC power supply, 3.5A current draw, stepper motor driven electrohydraulic pump for precise photochemical dispensing, viscosity range 1-3000 cps, designed for accurate repeatable dispense control in semiconductor fabrication, ideal for photoresist, solvents, developers, and specialty chemicals, all wetted surfaces with Teflon compatibility, original equipment from Cybor Corporation (IDI Cybor).
2) MACE Cumulative Mass Flow Meter – CUM NC configuration for monitoring and measuring fluid dispensing volume, precision mass flow measurement device integrated with pump assembly, ensures accurate chemical consumption tracking, typical of 1990s-2000s semiconductor track systems (SVG 8800/8900 series).

Certificate of Repair meets Cybor Standards, dated 08 Feb 2000, Pump Options 05116-00-0K. Used refurbished condition, Suitable for industrial equipment maintenance, semiconductor fab restoration, or process control equipment applications. Manual-controlled dispense system.

Business & Industrial > Manufacturing & Metalworking > Semiconductor & PCB Equipment